公开(公告)号：US20230375825A1

公开(公告)日：2023-11-23

申请号：US17749509

申请日：2022-05-20

Applicant: Infineon Technologies AG

Inventor： Christian BRETTHAUER ,  Malika BELLA

IPC: G02B26/08 ,  B81C1/00

CPC classification number: G02B26/0858 ,  B81C1/00142

Abstract: A light steering system includes: a reflective structure configured to tilt about a first axis; a frame that includes a frame recess over which the reflective structure is suspended; and a suspension assembly that includes a piezoelectric corrugated structure coupled to and between the reflective structure and the frame. The piezoelectric corrugated structure includes a first corrugated surface including concentric rings of alternating peaks and valleys; a second corrugated surface arranged opposite to the first corrugated surface; a plurality of peak electrodes, each peak electrode being coupled to a respective peak of the first corrugated surface; a plurality of valley electrodes, each valley electrode being coupled to a respective valley of the first corrugated surface; and a common electrode layer coupled to the second corrugated surface, wherein the common electrode layer is arranged counter to the plurality of peak electrodes and to the plurality of valley electrodes.

公开(公告)号：US20250091858A1

公开(公告)日：2025-03-20

申请号：US18822580

申请日：2024-09-03

Applicant: Infineon Technologies AG

Inventor： Theresa LUTZ ,  Malika BELLA ,  Stephan Gerhard ALBERT ,  Andre BROCKMEIER ,  Mohanraj SOUNDARA PANDIAN ,  Thomas BEVER

IPC: B81B3/00 ,  B81C1/00

Abstract: A microelectromechanical system (MEMS) mirror device includes a frame that defines a frame cavity; a suspension assembly; and a mirror body coupled to the frame by the suspension assembly such that the mirror body is suspended over the frame cavity. The mirror body comprises a sandwich structure that includes a front plate, a back plate, and a hollow core assembly arranged between the front plate and the back plate. The front plate and the back plate define a thickness dimension of the mirror body. The hollow core assembly includes a plurality of support structures that extend between the front plate and the back plate and define a plurality of cavities between the front plate and the back plate.

公开(公告)号：US20210396990A1

公开(公告)日：2021-12-23

申请号：US16904186

申请日：2020-06-17

Applicant: Infineon Technologies AG

Inventor： Malika BELLA

IPC: G02B26/08 ,  G01S7/481 ,  G02B26/10 ,  B81B3/00

Abstract: A microelectromechanical system (MEMS) device including an oscillator structure configured to oscillate about a rotation axis; a frame that is rotationally fixed, the frame including a frame recess within which the oscillator structure is suspended; and a suspension assembly mechanically coupled to and between the oscillator structure and the frame, the suspension assembly configured to suspend the oscillator structure within the frame recess. The suspension assembly includes a central support beam that extends lengthwise along the rotation axis, the central support beam being mechanically coupled to and between the oscillator structure and the frame; a first outer support beam mechanically coupled to the oscillator structure and laterally displaced from the central support beam in a first direction orthogonal to the rotation axis; and at least one first interior support beam directly coupled to and between the central support beam and the first outer support beam.