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公开(公告)号：US20210373322A1
公开(公告)日：2021-12-02
申请号：US17302938
申请日：2021-05-17
Applicant: Infineon Technologies AG
Inventor： Stephan Gerhard ALBERT , Marten OLDSEN
Abstract: A method for producing a MEMS device comprises fabricating a first semiconductor layer and selectively depositing a second semiconductor layer over the first semiconductor layer, wherein the second semiconductor layer comprises a first part composed of monocrystalline semiconductor material and a second part composed of polycrystalline semiconductor material. The method furthermore comprises structuring at least one of the semiconductor layers, wherein the monocrystalline semiconductor material of the first part and underlying material of the first semiconductor layer form a spring element of the MEMS device and the polycrystalline semiconductor material of the second part and underlying material of the first semiconductor layer form at least one part of a comb drive of the MEMS device.
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Patent Agency Ranking
公开(公告)号：US20250091858A1
公开(公告)日：2025-03-20
申请号：US18822580
申请日：2024-09-03
Applicant: Infineon Technologies AG
Inventor： Theresa LUTZ , Malika BELLA , Stephan Gerhard ALBERT , Andre BROCKMEIER , Mohanraj SOUNDARA PANDIAN , Thomas BEVER
Abstract: A microelectromechanical system (MEMS) mirror device includes a frame that defines a frame cavity; a suspension assembly; and a mirror body coupled to the frame by the suspension assembly such that the mirror body is suspended over the frame cavity. The mirror body comprises a sandwich structure that includes a front plate, a back plate, and a hollow core assembly arranged between the front plate and the back plate. The front plate and the back plate define a thickness dimension of the mirror body. The hollow core assembly includes a plurality of support structures that extend between the front plate and the back plate and define a plurality of cavities between the front plate and the back plate.
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公开(公告)号：US20240159877A1
公开(公告)日：2024-05-16
申请号：US18054254
申请日：2022-11-10
Applicant: Infineon Technologies AG
Inventor： David BRUNNER , Stephan Gerhard ALBERT
CPC classification number: G01S7/4817 , G01B7/30 , G01D5/24 , G01S17/89
Abstract: A scanning system includes an oscillator structure configured to oscillate about an inner axis according to a first oscillation and oscillate about an outer axis according to a second oscillation; an inner frame mechanically coupled to the oscillator structure by a first support structure and a second support structure that extend along the inner axis; an outer frame mechanically coupled to the inner frame by a third support structure and a fourth support structure that extend along the outer axis; and an inner axis sensor positioned between the inner frame and the outer frame, wherein the inner axis sensor is configured to sense a first relative movement of the inner frame relative to the outer frame and generate a first sensor signal corresponding to the first relative movement, and wherein the first sensor signal is representative of a first angular position of the oscillator structure about the inner axis.
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公开(公告)号：US20250110330A1
公开(公告)日：2025-04-03
申请号：US18980107
申请日：2024-12-13
Applicant: Infineon Technologies AG
Inventor： Han Woong YOO , Stephan Gerhard ALBERT , David BRUNNER , Norbert DRUML , Selma KARIC , Leonhard NIEDERMUELLER , Georg SCHITTER , Richard SCHROEDTER
Abstract: A method of Lissajous scanning includes driving a first oscillator structure about a first rotation axis at a first resonance frequency according to a first driving signal, and driving a second oscillator structure about a second rotation axis at a second resonance frequency according to second driving signal different from the first resonance frequency. The first driving signal has a first low level, a first high level, and a first duty cycle, the combination of which produces the first resonance frequency, and the second driving signal has a second low level, a second high level, and a second duty cycle, the combination of which produces the second resonance frequency. At least one of the second low level, the second high level, and the second duty cycle is different from the first low level, the first high level, and the first duty cycle, respectively.
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公开(公告)号：US20220317439A1
公开(公告)日：2022-10-06
申请号：US17220149
申请日：2021-04-01
Applicant: Infineon Technologies AG
Inventor： Han Woong YOO , Stephan Gerhard ALBERT , David BRUNNER , Norbert DRUML , Selma KARIC , Leonhard NIEDERMUELLER , Georg SCHITTER , Richard SCHROEDTER
Abstract: A method of Lissajous scanning includes driving a first oscillator structure about a first rotation axis at a first resonance frequency according to a first driving signal, and driving a second oscillator structure about a second rotation axis at a second resonance frequency according to second driving signal different from the first resonance frequency. The first driving signal has a first low level, a first high level, and a first duty cycle, the combination of which produces the first resonance frequency, and the second driving signal has a second low level, a second high level, and a second duty cycle, the combination of which produces the second resonance frequency. At least one of the second low level, the second high level, and the second duty cycle is different from the first low level, the first high level, and the first duty cycle, respectively.
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公开(公告)号：US20220187590A1
公开(公告)日：2022-06-16
申请号：US17122300
申请日：2020-12-15
Applicant: Infineon Technologies AG
Inventor： David BRUNNER , Stephan Gerhard ALBERT , Franz Michael DARRER , Georg SCHITTER , Richard SCHROEDTER , Han Woong YOO
Abstract: A scanning system includes a microelectromechanical system (MEMS) scanning structure configured with a desired rotational mode of movement based on a driving signal; a plurality of comb-drives configured to drive the MEMS scanning structure according to the desired rotational mode of movement based on the driving signal, each comb-drive including a rotor comb electrode and a stator comb electrode that form a capacitive element that has a capacitance that depends on the deflection angle of the MEMS scanning structure; a driver configured to generate the at least one driving signal; a sensing circuit selectively coupled to at least a subset of the plurality of comb-drives for receiving sensing signals therefrom, wherein each sensing signal is representative of the capacitance of a corresponding comb-drive; and a processing circuit configured to determine a scanning direction of the MEMS scanning structure in the desired rotational mode of movement based on the sensing signals.
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