MEMS SWITCH, DRIVING METHOD THEREOF, AND ELECTRONIC DEVICE
Abstract:
A MEMS switch includes: a substrate, an anchor point, the first signal line, a first driving electrode, a switch beam, and a second signal line. The anchor point is on the substrate. The first signal line and the first driving electrode are on the substrate, and are arranged on two sides of the anchor point. The second signal line is on a side of the anchor point close to the substrate. The switch beam is connected with the anchor point, and two ends of the switch beam are suspended and on the side of the anchor point away from the substrate, an orthographic projection of the switch beam onto the substrate surface coincides at least partially with the orthographic projection of the first signal line onto the substrate surface, and an orthographic projection of the first driving electrode onto the substrate surface, respectively.
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