Invention Grant
- Patent Title: Process for fabricating infrared detector arrays and resulting article of manufacture
- Patent Title (中): 制造红外探测器阵列的方法和制造方法
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Application No.: US3577631DApplication Date: 1967-05-16
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Publication No.: US3577631APublication Date: 1971-05-04
- Inventor: BYLANDER ERNEST G , JARMAN HALL E
- Applicant: TEXAS INSTRUMENTS INC
- Assignee: Texas Instruments Inc
- Current Assignee: Texas Instruments Inc
- Priority: US63891567 1967-05-16
- Main IPC: C23F1/02
- IPC: C23F1/02 ; H01L21/308 ; H01L27/146 ; B01J17/00 ; H01C7/08
Abstract:
An infrared detector array is fabricated by alloying a slice of mercury doped germanium to a degenerate germanium substrate. After being lapped to the desired thickness, the slice is etched through to the substrate to form individual detector bars using a metal mask which is then partially removed to form a gold contact strip on each bar. Output conductors are formed by patterning copper films thermocompression bonded to high temperature plastics, gold plating the conductors, and connecting the gold plated conductors to the gold contact strips by gold jumper wires thermocompression bonded to the conductors and to the contact strips.
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