An improved zener diode for monolithic integrated circuits includes a first diffused region of one type conductivity having two portions, one of which portions has a significantly higher maximum impurity concentration than the other portion. A second diffused region of opposite type high conductivity is disposed within both portions of the first region and is separated from each by a PN junction, the PN junction between the second region and the lower conductivity portion being at a significantly greater depth than the PN junction between the second region and the high impurity concentration portion. The electrical contact to the second region is made only over the lower impurity concentration portion where the PN junction is at a significantly greater depth.