In the fabrication of an electrophotographic recording material composed of a photoconductive layer of selenium, at least one selenium alloy, or at least one selenium compound applied to a conductive substrate, the quality and durability of the bond between the layer and the substrate is improved by initially vapor-depositing a thin layer of the photoconductive substance while the substrate temperature is above the glass transformation temperature of the substance, and then vapor-depositing the remainder of the intended layer at a substantially lower substrate temperature.