Invention Grant
US4039702A Method for settling a glass suspension using preferential polar
adsorbtion
失效
使用优选极性吸附来确定玻璃悬挂的方法
- Patent Title: Method for settling a glass suspension using preferential polar adsorbtion
- Patent Title (中): 使用优选极性吸附来确定玻璃悬挂的方法
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Application No.: US540410Application Date: 1975-01-13
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Publication No.: US4039702APublication Date: 1977-08-02
- Inventor: Raymond DiBugnara , Richard Allison
- Applicant: Raymond DiBugnara , Richard Allison
- Applicant Address: CA Los Angeles
- Assignee: TRW Inc.
- Current Assignee: TRW Inc.
- Current Assignee Address: CA Los Angeles
- Main IPC: H01L21/316
- IPC: H01L21/316 ; H01L21/56 ; B05D5/12
Abstract:
A method for settling suspended glass particles from a slurry containing small amounts of a substance, which substance is preferentially adsorbed to the surface of the suspended glass particles, and which adsorbed substance facilitates centrifugal sedimentation of the glass particles without substantially altering the colloidal nature of the suspension. In particular, a method for forming a glass film on a semiconductive wafer or circuit, especially mesa etched structures, including the step of adding a small amount of hydrogen peroxide to the glass slurry before sedimentation of the glass film.
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