发明授权
US4044254A Scanning corpuscular-beam transmission type microscope including a beam
energy analyzer
失效
扫描粒子束透射型显微镜，包括光束能量分析仪
- 专利标题： Scanning corpuscular-beam transmission type microscope including a beam energy analyzer
- 专利标题（中）： 扫描粒子束透射型显微镜，包括光束能量分析仪
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申请号： US715847申请日： 1976-08-19
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公开(公告)号： US4044254A公开(公告)日： 1977-08-23
- 发明人: Burkhard Krisch , Moriz V. Rauch
- 申请人： Burkhard Krisch , Moriz V. Rauch
- 申请人地址： DT Munich
- 专利权人： Siemens Aktiengesellschaft
- 当前专利权人： Siemens Aktiengesellschaft
- 当前专利权人地址： DT Munich
- 优先权： DT2538523 19750828
- 主分类号： H01J37/26
- IPC分类号： H01J37/26 ; H01J37/05 ; H01J37/147
摘要：
A scanning corpuscular-beam transmission-type microscope including an energy analyzer below the specimen and a first deflection system disposed between the beam source and the specimen. A second deflection system is disposed between the specimen and the energy analyzer for redirecting the beam to the input aperture of the energy analyzer and is rotated with respect to the first deflection system to compensate for rotation of the specimen image by the objective lens of the microscope.
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