公开(公告)号：US4044256A

公开(公告)日：1977-08-23

申请号：US719140

申请日：1976-08-31

申请人： Burkhard Krisch ,  Karl-Heinz Muller ,  Moriz von Rauch ,  Lee H. Veneklasen

发明人： Burkhard Krisch ,  Karl-Heinz Muller ,  Moriz von Rauch ,  Lee H. Veneklasen

IPC分类号： H01J37/26 ,  H01J37/02

CPC分类号： H01J37/02

摘要： A corpuscular-beam microscope including a support stand, a columnar housing containing the optical elements of the microscope, electronic control and regulating means for generating and transmitting voltage signals to parts of a beam generator of the microscope which are at high-voltage potential, and at least one high-vacuum pump for evacuating the microscope housing. The improvement of the invention comprises the support stand comprising a horizontal base member and a flexure-resistant vertical support member disposed on the base member. The microscope housing, the control and regulating means, and the pump are mounted on different sides of the support member and are arranged so that the center of gravity of the support stand is disposed between the support member and the optical axis of the microscope near the axis.

摘要翻译： 一种包括支撑架，包含显微镜的光学元件的圆柱形壳体的电子束显微镜，用于产生并将电压信号传输到显微镜的高度发生电压的光束发生器的部件的电子控制和调节装置，以及 至少一个用于抽真空显微镜外壳的高真空泵。 本发明的改进包括支撑台，其包括水平基座构件和设置在基座构件上的抗弯曲垂直支撑构件。 显微镜壳体，控制和调节装置以及泵安装在支撑构件的不同侧面上，并且布置成使得支撑架的重心布置在支撑构件和显微镜的光轴附近 轴。

公开(公告)号：US4038543A

公开(公告)日：1977-07-26

申请号：US696475

申请日：1976-06-15

申请人： Burkhard Krisch ,  Lee H. Veneklasen ,  Dieter Willasch

发明人： Burkhard Krisch ,  Lee H. Veneklasen ,  Dieter Willasch

IPC分类号： H01J37/09 ,  H01J37/22 ,  H01J37/28 ,  H01J37/26 ,  G01N23/04

CPC分类号： H01J37/09 ,  H01J37/22 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/2614

摘要： A scanning transmission electron microscope including an evacuated housing and a phase contrast device in which the imaging ray cone of the microscope generates a hologram having zones of positive or negative interference. The microscope includes means for separately detecting and measuring the intensities of the zones of positive or negative interference and a picture display means coupled to and controlled by the detecting means for monitoring the intensities detected and measured.The improvement of the invention comprises an improved detecting means including an image converter disposed in the electron beam path of the microscope on which the hologram is projected for converting the hologram into an optical image. Planar image masks are disposed outside of the microscope housing and have transparent and opaque areas which correspond to the zones of positive and negative interference of the hologram. An image transmission means, disposed adjacent the image converter, transmits the optical image with unchanged relative intensity distribution to the masks, and means, disposed adjacent the masks and coupled to the display means, measures the intensity of light transmitted through the transparent areas of the mask and generates an output signal corresponding to the intensities measured and detected for display on the display means.A method for correcting astigmatism and/or defocusing in such a microscope is also disclosed.

公开(公告)号：US4044255A

公开(公告)日：1977-08-23

申请号：US715848

申请日：1976-08-19

申请人： Burkhard Krisch ,  Moriz V. Rauch

发明人： Burkhard Krisch ,  Moriz V. Rauch

IPC分类号： H01J37/04 ,  H01J37/147 ,  H01J37/26

CPC分类号： H01J37/147 ,  H01J37/04

摘要： A corpuscular-beam transmission-type microscope in which image elements are generated simultaneously. The microscope includes a specimen holding stage movable perpendicular to the microscope axis in a pair of transverse adjustment directions, beam deflectors disposed behind the specimen along the beam path for deflecting an image in the microscope in at least one deflection direction, and magnetic lens imaging means disposed between the specimen and the beam deflectors which helically deflects, between the specimen and the beam deflectors, parts of the beam not disposed in the microscope axis and rotates the image of the specimen through an image rotation angle in the microscope. The improvement of the invention comprises the beam deflectors deflecting the beam in a pair of transverse deflection directions disposed in a plane parallel to the pair of transverse adjustment directions and rotated with respect to the pair of transverse adjustment directions through an angle coinciding with the image rotation angle.

摘要翻译： 其中同时产生图像元素的粒子束透射型显微镜。 显微镜包括：沿着横向调整方向垂直于显微镜轴线移动的检体保持台，沿着光束路径设置在试样后面的光束偏转器，用于在至少一个偏转方向上偏转显微镜中的图像;以及磁性透镜成像装置 设置在样本和在样本和光束偏转器之间螺旋偏转的光束偏转器，未设置在显微镜轴上的光束的部分并且通过显微镜中的图像旋转角旋转样本的图像。 本发明的改进包括光束偏转器，其偏转设置在平行于一对横向调节方向的平面中的一对横向偏转方向，并且相对于一对横向调节方向通过与图像旋转一致的角度旋转 角度。

公开(公告)号：US6035721A

公开(公告)日：2000-03-14

申请号：US29329

申请日：1998-06-11

申请人： Burkhard Krisch

发明人： Burkhard Krisch

IPC分类号： G01D3/028 ,  G01D3/036 ,  G01L19/04 ,  G01F1/86

CPC分类号： G01D3/0365 ,  G01L27/002 ,  G01L9/025

摘要： A process for compensating for an incorrect operation of measuring devices fitted with a programming section caused by external influences. The measuring devices and a sensor responding to the influence are fitted in a chamber exposed to the influencing factor. When the influencing factor changes, measurements from the measuring device and the sensor are detected by a data processing system which provides the programming section of the measuring devices with signals compensating for the incorrect operation caused by the influencing factor. To perform such a process rapidly and thus economically, the influencing factor is continuously changed and the current output value of the sensor and the current measurement provided by the measuring device are detected with a timing predetermined by the data processing system.

摘要翻译： PCT No.PCT / DE96 / 01657 Sec。 371日期：1998年6月11日 102（e）1998年6月11日PCT 1996年8月30日PCT PCT。 公开号WO97 / 09587 日期1997年3月13日一种用于补偿由外部影响引起的装配有编程部分的测量装置的错误操作的过程。 测量装置和响应影响的传感器安装在暴露于影响因素的室内。 当影响因素变化时，通过数据处理系统检测来自测量装置和传感器的测量结果，该系统为测量装置的编程部分提供补偿因影响因素引起的不正确操作的信号。 为了快速且经济地进行这样的处理，影响因素不断变化，并且由数据处理系统预定的定时检测传感器的当前输出值和由测量装置提供的当前测量值。

公开(公告)号：US5691479A

公开(公告)日：1997-11-25

申请号：US491901

申请日：1995-09-25

申请人： Burkhard Krisch ,  Werner Riedel

发明人： Burkhard Krisch ,  Werner Riedel

IPC分类号： G01L19/00 ,  G01L9/00 ,  G01L7/00

CPC分类号： G01L19/147 ,  G01L19/0038 ,  G01L19/0645

摘要： A pressure transducer with a disk-shaped pressure sensor component is connected to a pressure supplying body. The pressure sensor component is surrounded on the outside by a cap-like part whose bottom is above the side of the pressure sensor component that faces away from the pressure supplying body. The pressure supplying body is also connected to a pressure transmitting part over a separating membrane. In order to be able to produce such a pressure transducer at a comparatively low cost, the pressure sensor component is a standard pressure sensor with a conventional base like those used to manufacture semiconductor components. The base of the pressure sensor is in contact with the bottom of the cap-like part through an intermediate filling of cast resin. The bottom of the cap-like part has individual openings for connecting wires and the connecting tube on the low pressure side. The cap-like part is welded to the pressure transmitting part.

摘要翻译： PCT No.PCT / DE93 / 01238 Sec。 371 1995年9月25日第 102（e）1995年9月25日PCT 1993年12月21日PCT PCT。 公开号WO94 / 15189 日期：1994年7月7日具有盘形压力传感器部件的压力传感器与压力供给体连接。 压力传感器部件通过其底部位于压力传感器部件的远离压力供给体的侧面之上的帽状部分在外部被包围。 压力供给体也与分离膜上的压力传递部连接。 为了能够以相对较低的成本生产这种压力传感器，压力传感器部件是具有常规基座的标准压力传感器，如用于制造半导体部件的那些。 压力传感器的底部通过浇铸树脂的中间填充与帽状部分的底部接触。 帽状部分的底部具有用于连接线的单独的开口和低压侧的连接管。 帽状部分焊接到压力传递部分。

公开(公告)号：US4211924A

公开(公告)日：1980-07-08

申请号：US7647

申请日：1979-01-29

申请人： Karl-Heinz Muller ,  Burkhard Krisch ,  Volker Rindfleisch ,  Hans F. R. Neuendorff

发明人： Karl-Heinz Muller ,  Burkhard Krisch ,  Volker Rindfleisch ,  Hans F. R. Neuendorff

IPC分类号： H01J37/22 ,  H01J37/295

CPC分类号： H01J37/28 ,  H01J37/224 ,  H01J37/2955

摘要： An improved transmission-type, scanning charged-particle beam microscope including a television camera tube and a television display tube for generating and displaying a diffraction image of a specimen to be examined. The improvement of the invention comprises the provision of a transparent fluorescent screen disposed in the ray cone of the beam behind the specimen along the beam path in the microscope, light-optical means adapted for imaging the fluorescent screen on a target of the television camera tube, and detector means for integrally detecting radiation emanating from the fluorescent screen.

摘要翻译： 一种改进的透射型扫描带电粒子束显微镜，包括电视照相机管和用于产生和显示被检样本的衍射图像的电视显示管。 本发明的改进包括在显微镜中沿着光束路径设置在样品后面的光束的透射荧光屏中的光学装置，适于将荧光屏成像在电视摄像机管的目标上 以及用于整体地检测从荧光屏发出的辐射的检测器装置。

公开(公告)号：US4097739A

公开(公告)日：1978-06-27

申请号：US719111

申请日：1976-08-31

申请人： Karl-Heinz Muller ,  Moriz V. Rauch ,  Burkhard Krisch ,  Lee H. Veneklasen

发明人： Karl-Heinz Muller ,  Moriz V. Rauch ,  Burkhard Krisch ,  Lee H. Veneklasen

IPC分类号： H01J37/141 ,  H01J37/147 ,  H01J37/28 ,  H01J37/26

CPC分类号： H01J37/141 ,  H01J37/147 ,  H01J37/28

摘要： A scanning, corpuscular-beam microscope which includes a beam deflection system comprising a first stage for deflecting the beam out of the optical axis of the microscope and a second stage, disposed after the first stage along the beam path, for deflecting the beam towards the optical axis of the microscope. A first objective lens having a short focal length is disposed after the second beam deflection stage along the beam path for focusing the beam on a specimen. The improvement of the invention comprises the provision of a second objective lens having a long focal length which is disposed above the first objective lens along the beam path. The second objective lens is excited for low magnification of the specimen by the microscope and redirects the deflected beam in a direction approximately parallel to the microscope axis and focuses the beam on the specimen. The first objective lens and the second stage of the deflection system are inoperative during the redirection of the beam by the second objective lens.

摘要翻译： 一种扫描型微粒子束显微镜，其包括光束偏转系统，该光束偏转系统包括用于将光束偏离显微镜的光轴的第一级和设置在沿着光束路径的第一级之后的第二级，用于将光束偏向 显微镜的光轴。 具有短焦距的第一物镜沿着光束路径设置在第二光束偏转台之后，用于将光束聚焦在样本上。 本发明的改进包括提供具有长焦距的第二物镜，其沿着光束路径设置在第一物镜上方。 通过显微镜对第二个物镜进行低放大倍率的激光，并将偏转的光束在大致平行于显微镜轴的方向上重定向并将光束聚焦在样品上。 偏转系统的第一物镜和第二阶段在通过第二物镜重定向光束期间不起作用。

公开(公告)号：US4044254A

公开(公告)日：1977-08-23

申请号：US715847

申请日：1976-08-19

申请人： Burkhard Krisch ,  Moriz V. Rauch

发明人： Burkhard Krisch ,  Moriz V. Rauch

IPC分类号： H01J37/26 ,  H01J37/05 ,  H01J37/147

CPC分类号： H01J37/05 ,  H01J37/1474

摘要： A scanning corpuscular-beam transmission-type microscope including an energy analyzer below the specimen and a first deflection system disposed between the beam source and the specimen. A second deflection system is disposed between the specimen and the energy analyzer for redirecting the beam to the input aperture of the energy analyzer and is rotated with respect to the first deflection system to compensate for rotation of the specimen image by the objective lens of the microscope.

摘要翻译： 扫描型红外光束透射型显微镜，其包括在试样下方的能量分析装置和设置在光束源与试样之间的第一偏转系统。 第二偏转系统设置在样本和能量分析器之间，用于将光束重定向到能量分析仪的输入孔，并且相对于第一偏转系统旋转以补偿由显微镜的物镜显示的标本图像的旋转 。