发明授权
- 专利标题： Disc support structure
- 专利标题（中）： 光盘支持结构
-
申请号： US638299申请日： 1975-12-08
-
公开(公告)号： US4093201A公开(公告)日： 1978-06-06
- 发明人: Wolfgang Dietze , Richard Mittermeier , Gerhard Steinwagner
- 申请人： Wolfgang Dietze , Richard Mittermeier , Gerhard Steinwagner
- 申请人地址： DT Berlin & Munich
- 专利权人： Siemens Aktiengesellschaft
- 当前专利权人： Siemens Aktiengesellschaft
- 当前专利权人地址： DT Berlin & Munich
- 优先权： DT2322952 19730507
- 主分类号： C23C16/01
- IPC分类号： C23C16/01 ; C23C16/22 ; C30B31/14 ; B23Q3/00
摘要：
A support structure composed of Si or SiC for supporting semiconductor crystal discs during annealing or doping thereof. A somewhat tube-shaped member having at least one flat side is formed by thermal deposition of a gaseous silicon compound onto a similarly shaped carrier member and the tube-shaped member is then cut and mechanically processed in directions parallel and perpendicular to the axes of the tube to form a support structure having a flat base and upwardly extending curved side walls.