发明授权
US4178084A Device for measuring light incident on an image forming optical system
失效
用于测量入射在图像形成光学系统上的光的装置
- 专利标题: Device for measuring light incident on an image forming optical system
- 专利标题(中): 用于测量入射在图像形成光学系统上的光的装置
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申请号: US869447申请日: 1978-01-16
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公开(公告)号: US4178084A公开(公告)日: 1979-12-11
- 发明人: Kazuya Matsumoto , Susumu Matsumura , Aiichiro Koyama , Youichi Okuno , Tokuichi Tsunlkawa , Tadashi Ito
- 申请人: Kazuya Matsumoto , Susumu Matsumura , Aiichiro Koyama , Youichi Okuno , Tokuichi Tsunlkawa , Tadashi Ito
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX50-68765 19750606; JPX50-68766 19750606; JPX50-68767 19750606; JPX50-68768 19750606; JPX50-68769 19750606; JPX50-68770 19750606; JPX50-68771 19750606; JPX50-68772 19750606; JPX50-68773 19750606; JPX50-68774 19750606; JPX50-68775 19750606; JPX50-68776 19750606; JPX50-68777 19750606; JPX50-68778 19750606; JPX50-68779 19750606; JPX50-68780 19750606; JPX50-68781 19750606; JPX50-68782 19750606; JPX50-68783 19750606
- 主分类号: G02B5/32
- IPC分类号: G02B5/32 ; G03B7/099 ; G03B7/00 ; G03B19/12
摘要:
The present invention relates to a device for measuring light incident on an image-forming optical system, making use of a plural number of diffraction elements. The plural number of the diffraction elements are respectively provided in the optical path of the image-forming optical system. Further the plural number of the diffraction elements respectively have a certain predetermined area. The plural number of the diffraction elements, seen along the direction of the optical axis of the image-forming optical system, are substantially only partially overlapped with respect to each other. The light beam incident on a diffraction element is divided into a non-diffracted light beam and a diffracted light beam. Thus, the diffracted light beam is directed toward the light detecting means so as to be measured while the non-diffracted light beam advances along the above mentioned optical axis. Consequently, at the part at which the diffraction elements overlap each other, the non-diffracted light beam emerging from the preceeding diffraction element again enters the following diffraction element. This light beam is again divided into a non-diffracted light beam and a diffracted light beam by means of the following diffraction element. The diffracted light beam is measured by a light detecting means in the same way as in the above mentioned case, while the non-diffracted light beam advances along the above mentioned optical axis. Thus, the light beam which passes through the overlapping parts is measured a plural number of times.
公开/授权文献
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