发明授权
- 专利标题： Radiation-sensitive composition
- 专利标题（中）： 辐射敏感组合物
-
申请号： US877866申请日： 1978-02-15
-
公开(公告)号： US4187205A公开(公告)日： 1980-02-05
- 发明人: Yoshio Hatano , Saburo Nonogaki , Shinkichi Horigome , Shungo Sugawara
- 申请人： Yoshio Hatano , Saburo Nonogaki , Shinkichi Horigome , Shungo Sugawara
- 申请人地址： JPX both of JPX both of
- 专利权人： Nippon Telegraph and Telephone Public Corporation,Hitachi, Ltd.
- 当前专利权人： Nippon Telegraph and Telephone Public Corporation,Hitachi, Ltd.
- 当前专利权人地址： JPX both of JPX both of
- 优先权： JPX52/16232 19770218
- 主分类号： G03C1/00
- IPC分类号： G03C1/00 ; C08G59/00 ; C08G59/34 ; C08G59/40 ; C08K5/00 ; C08L47/00 ; G03F7/004 ; G03F7/038 ; G03F7/039 ; H01L21/027 ; C08K5/34 ; C08K5/08 ; C08K5/13
摘要：
A radiation-sensitive composition comprising a radiation-sensitive polymer which has in its molecule a plurality of epoxy groups and a plurality of bromine atoms, and at least one stabilizer which is selected from the group consisting of compounds having stable free radicals, polymerization inhibitors, ketone-amine reaction products, and phenol derivatives. Even when the composition is preserved for a long term, the characteristics do not change.