发明授权
- 专利标题: System for detecting the position of an object
- 专利标题(中): 用于检测物体位置的系统
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申请号: US797848申请日: 1977-05-17
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公开(公告)号: US4291334A公开(公告)日: 1981-09-22
- 发明人: Michihiro Mese , Seiji Kashioka , Masakazu Ejiri , Takafumi Miyatake , Isamu Yamazaki , Toshimitsu Hamada
- 申请人: Michihiro Mese , Seiji Kashioka , Masakazu Ejiri , Takafumi Miyatake , Isamu Yamazaki , Toshimitsu Hamada
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX51-56519 19760519
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01B11/02 ; G01D5/249 ; G05D3/12 ; G06T1/00 ; G06T7/00 ; G06T7/60 ; H01L21/60 ; H01L21/68 ; H04M7/00
摘要:
An apparatus for detecting the position of an object. The apparatus has an optical device for magnifying or enlarging a plurality of portions on the object, a photoelectric converter adapted for converting the enlarged portion image into electric signals, a plurality of thresholding circuits adapted for changing analogue signals from the respective photoelectric converter into binary signals with a threshold value determined by a signal level given by a first signal holding circuit, a circuit for calculating the threshold value from the analogue signals, a circuit for detecting the approximate position of a specific pattern in the enlarged portion images through a coarse sampling of the binary signals. A circuit for detecting the exact position of the specific pattern through measuring the area of a specific brightness in a plurality of regions in the enlarged portion images, by a fine sampling of the binary signals, and a controller for controlling the operations of respective circuits.
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