发明授权
- 专利标题: Process for preparing high-purity .alpha.-type silicon nitride
- 专利标题(中): 制备高纯度α型氮化硅的方法
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申请号: US222671申请日: 1981-01-05
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公开(公告)号: US4346068A公开(公告)日: 1982-08-24
- 发明人: Kiyoshi Kasai , Yoshitaka Kubota , Takaaki Tsukidate
- 申请人: Kiyoshi Kasai , Yoshitaka Kubota , Takaaki Tsukidate
- 申请人地址: JPX Shin Nanyo
- 专利权人: Toyo Soda Manufacturing Co., Ltd.
- 当前专利权人: Toyo Soda Manufacturing Co., Ltd.
- 当前专利权人地址: JPX Shin Nanyo
- 优先权: JPX55-1404 19800111
- 主分类号: C01B21/068
- IPC分类号: C01B21/068
摘要:
High-purity .alpha.-type silicon nitride comprised of a granular crystal having an .alpha.-phase content of at least 95%, a nitrogen content of at least 38% by weight and an average particle size of not larger than 3 .mu.m is provided. This high-purity .alpha.-type silicon nitride is prepared by heating a nitrogen-containing silane compound at a temperature of at least about 1,300.degree. C. in a heating furnace comprised of a material containing a metal having a melting point exceeding 1,600.degree. C. and capable of being bonded with oxygen at the heating temperature.
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