发明授权
- 专利标题: Process for producing SF.sub.6 through SF.sub.5 Cl
- 专利标题(中): 通过SF5Cl生产SF6的方法
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申请号: US286887申请日: 1981-07-27
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公开(公告)号: US4390511A公开(公告)日: 1983-06-28
- 发明人: Yoshio Oda , Shinsuke Morikawa , Masaaki Ikemura , Tomio Yarita , Makoto Noshiro , Isao Gotoh , Yukio Jitsugiri , Shigeaki Yonemori , Kimihiko Sato , Keiichi Uchida
- 申请人: Yoshio Oda , Shinsuke Morikawa , Masaaki Ikemura , Tomio Yarita , Makoto Noshiro , Isao Gotoh , Yukio Jitsugiri , Shigeaki Yonemori , Kimihiko Sato , Keiichi Uchida
- 申请人地址: JPX Tokyo
- 专利权人: Asahi Glass Company Ltd.
- 当前专利权人: Asahi Glass Company Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX55-109809 19800812; JPX55-109810 19800812; JPX55-132829 19800926
- 主分类号: C01B17/45
- IPC分类号: C01B17/45 ; C01B7/24 ; C01B17/46
摘要:
SF.sub.6 is produced by a pyrolysis of SF.sub.5 Cl obtained by a reaction of sulfur or sulfur chloride with chlorine and an amine/hydrogen fluoride complex or a reaction of sulfur tetrafluoride with chlorine and an amine/hydrogen fluoride complex.
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