摘要:
A substrate processing gas of the present invention contains IF5; and IF7, in which a content of the IF5 is equal to or more than 1 ppm and equal to or less than 2% on a volume basis with respect to a total amount of the IF5 and the IF7.
摘要:
A substrate processing gas of the present invention contains IF5; and IF7, in which a content of the IF5 is equal to or more than 1 ppm and equal to or less than 2% on a volume basis with respect to a total amount of the IF5 and the IF7.
摘要:
An IF7-derived iodine fluoride compound recovery method includes putting gas containing IF7 into contact with a material to be fluorinated, thereby converting the IF7 into IF5; and cooling gas containing the IF5, thereby trapping the IF5 as an IF7-derived iodine fluoride compound. The recovered IF5 may be reacted with fluorine to generate IF7, which may be reused for a semiconductor production process.
摘要:
There is provided a process for the production of iodine pentafluoride which avoids the problems of the production process of iodine pentafluoride of the prior art as much as possible, and which carries out the reaction of fluorine and iodine moderately, so that iodine pentafluoride is produced more safely and more productively.In the process for the production of iodine pentafluoride by reacting fluorine and iodine, fluorine is supplied to the gas phase 14 which is adjacent to the liquid phase 12 of iodine pentafluoride which contains iodine.
摘要:
The production process comprises A) forming an acidic aqueous solution comprising alkali metal cations, bromide anions, and sulfamate anions; B) feeding into said aqueous solution a source of alkali metal cations and chlorine-containing bromide oxidant proportioned to keep the resultant aqueous medium acidic and to form an acidic product solution containing at least about 5 wt % of active bromine, and C) raising the pH of the aqueous product solution with water-soluble base to at least about 10.
摘要:
A method for enhancing the recovery of dense soda ash from Na.sub.2 SO.sub.4 - and NaCl-containing aqueous sodium carbonate solutions by first co-crystallizing anhydrous sodium carbonate and burkeite and next introducing the co-crystallized solids to an aqueous medium at elevated temperature to dissolve the burkeite and cause reversion of the anhydrous sodium carbonate solids to crystalline sodium carbonate monohydrate, which is then separated from the dissolved sulfate and recovered as product.
摘要翻译:通过首先使无水碳酸钠和伯克碱共结晶,然后将共结晶的固体在高温下引入含水介质中以溶解烧碱,从而提高从含有Na 2 SO 4和含NaCl的碳酸钠水溶液中回收致密苏打灰的方法 并引起无水碳酸钠固体转化为结晶碳酸钠一水合物,然后将其从溶解的硫酸盐中分离出来并作为产物回收。
摘要:
A product mixture resulting from the reaction of an anhydrous gaseous mixture of sulfur dioxide, chlorine and hydrogen fluoride in the presence of a catalyst is heated at a temperature of at least about 35.degree. C. under pressures up to about 65 psi to effect substantial conversion of undesired free chlorine in the resulting product mixture to sulfuryl chlorofluoride. The conversion of free chlorine to sulfuryl chlorofluoride allows the use of a completely anhydrous process from which uncontaminated sulfuryl fluoride and sulfuryl chlorofluoride products can readily be obtained. A method for the production of sulfuryl chlorofluoride from said gaseous mixture is also provided.
摘要:
Fine-grained polygonized halide alloy bodies are formed having comparable optical properties to a single crystal halide body. Heat and force are applied to a single crystal halide to recrystallize or polygonize the halide. Room temperature grain growth observed in fine-grained pure halides is inhibited by alloying.
摘要:
Iodine perchlorates of the formula X(OClO3)n wherein X is selected from the group consisting of I 115 and CsI 4, wherein n equals 3 when X is I and n equals 4 when X is CsI 4; are prepared by reacting ClOClO3 with either solid I or CsI at low temperatures. The iodine perchlorates are useful as energetic oxidizers.
摘要:
1. A process for producing chlorine pentafluoride comprising the steps of continuously passing fluorine as one reactant and at least one member of the group consisting of chlorine, chlorine monofluoride and chlorine trifluoride as another reactant into a reaction chamber adjacent the lower end of the chamber, maintaining the temperature and pressure in the reaction chamber sufficiently high to effect reaction between said reactants to form gaseous chlorine pentafluoride in a mixture with gaseous fluorine; continuously passing said mixture from the reaction chamber at a place adjacent the upper end of the chamber into a condensing chamber at a place adjacent the upper end of the condensing chamber; maintaining the temperature in said condensing chamber sufficiently low to effect condensation of chlorine pentafluoride from said mixture; withdrawing condensed chlorine pentafluoride from said condensing chamber, and continuously recirculating the uncondensed gas from the condensing chamber at a place remote from the upper end of the condensing chamber to said reaction chamber at a place adjacent the lower end of the reaction chamber.