发明授权
- 专利标题: Defect inspection system
- 专利标题(中): 缺陷检查系统
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申请号: US236229申请日: 1981-02-20
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公开(公告)号: US4403858A公开(公告)日: 1983-09-13
- 发明人: Hajime Yoshida
- 申请人: Hajime Yoshida
- 申请人地址: JPX Tokyo
- 专利权人: Hajime Industries Ltd.
- 当前专利权人: Hajime Industries Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX55-20965 19800221
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; G01N21/84 ; G01N21/88 ; G01N21/00
摘要:
A defect inspection system in which a reflector body is arranged at such an angle relative to an object to be inspected that in spite of any parallel movements of the image does not overlap the inspected object. The inspected object and the image thereof are both simultaneously picked up by the same television camera. Then, the video signal from the television camera is fed to a processor which then inspects whether or not the object to be inspected contains defects or flaws.
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