发明授权
- 专利标题: Fabrication of submicron-wide lines with shadow depositions
- 专利标题(中): 制造具有阴影沉积的亚微米宽线
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申请号: US344341申请日: 1982-02-01
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公开(公告)号: US4409262A公开(公告)日: 1983-10-11
- 发明人: Edward C. Jelks , George L. Kerber
- 申请人: Edward C. Jelks , George L. Kerber
- 申请人地址: DC Washington
- 专利权人: The United States of America as represented by the Secretary of the Navy
- 当前专利权人: The United States of America as represented by the Secretary of the Navy
- 当前专利权人地址: DC Washington
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; H01L21/027 ; B05D5/12
摘要:
A method of fabricating lines of submicron width, comprising the steps of:providing a substrate,depositing a first layer of metal upon the substrate;spinning a photoresist layer on the metal;patterning the photoresist layer;etching the metal to undercut the photoresist edge, e.g. with a mixture for approximately ten minutes at room temperature;depositing a second layer of metal at an angle .theta..sub.1 to the photoresist edge, thereby defining a long, submicron-wide opening to the underlying substrate;depositing a chosen material, for example, metallic or semiconductor, for the bridge onto the substrate at an angle of .theta..sub.2 through the submicron-wide opening; andremoving undesired material surrounding the bridge by dissolving the photoresist in hot acetone followed by stripping the remaining two layers of metal with etchant.
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