公开(公告)号：US5191342A

公开(公告)日：1993-03-02

申请号：US292767

申请日：1981-08-06

申请人： James M. Alsup ,  Edward C. Jelks

发明人： James M. Alsup ,  Edward C. Jelks

IPC分类号： G01S5/12

CPC分类号： G01S5/12

摘要： An apparatus determines the location of a signal source having coordinatesx,y). The source may be located as far away as two thousand km and does not require knowledge of ionospheric height or layer structure. The apparatus comprises at least three receivers adapted to receive the signals from the signal source. The coordinates, (x.sub.1,y.sub.1), (x.sub.2,y.sub.2) and (x.sub.3,y.sub.3), of each of the receivers are very precisely known. One receiver is capable of receiving signals from the other two receivers through different means (e.g. a wide-band telephone link). A plurality of at least three timers, one connected to each receiver, measures precisely the time difference of arrival (TDOA) of the signals from the signal source. A plurality of at least three means, connected one to each of the receiving means, determine the vertical angles .phi. at which the signal from the signal source is received by each of the receivers. More precisely, each receiver is in reality a phased array of individual antenna elements whose joint output can be used to measure both vertical angle and azimuth. Means are provided for calculating the coordinates (x,y) of the signal source from the measured vertical angles and the time differences of arrival.

摘要翻译： 装置确定具有坐标（x，y）的信号源的位置。 源可能位于距离两千公里的地方，不需要知道电离层高度或层结构。 该装置包括适于从信号源接收信号的至少三个接收器。 每个接收机的坐标（x1，y1），（x2，y2）和（x3，y3）是非常精确的。 一个接收机能够通过不同的装置（例如宽带电话链路）从其他两个接收机接收信号。 连接到每个接收器的多个至少三个定时器精确地测量来自信号源的信号的到达时间差（TDOA）。 连接到每个接收装置的至少三个装置确定了每个接收机接收来自信号源的信号的垂直角度phi。 更准确地说，每个接收机实际上是单独天线元件的相控阵列，其联合输出可用于测量垂直角和方位角。 提供了用于从测量的垂直角度和到达时间差计算信号源的坐标（x，y）的装置。

公开(公告)号：US4612085A

公开(公告)日：1986-09-16

申请号：US722250

申请日：1985-04-10

申请人： Edward C. Jelks ,  Michael R. Melloch

发明人： Edward C. Jelks ,  Michael R. Melloch

IPC分类号： H01L21/302 ,  C23C16/04 ,  C23C16/48 ,  G03F7/004 ,  H01L21/268 ,  B44C1/22 ,  C03C15/00 ,  C23F1/02

CPC分类号： C23C16/483 ,  C23C16/047 ,  G03F7/004 ,  H01L21/268 ,  Y10S438/98

摘要： Formation of a plasma etch mask on a film on a substrate by photodecomposition of a gas at selective portions of the film's surface to deposit etch mask material and form the etch mask is disclosed. The photodecomposition by blanket illumination through a photomask and by direct write with a computer controlled laser are both disclosed. The formation of the etch mask can be immediately followed by the plasma etch without breaking vacuum.

摘要翻译： 公开了通过在膜的表面的选择性部分处对气体进行光分解以沉积蚀刻掩模材料并形成蚀刻掩模来在基底上的膜上形成等离子体蚀刻掩模。 通过光掩模的毯式照明和通过计算机控制的激光直接写入的光分解都被公开。 蚀刻掩模的形成可以紧接着进行等离子体蚀刻而不破坏真空。

公开(公告)号：US4505949A

公开(公告)日：1985-03-19

申请号：US603545

申请日：1984-04-25

申请人： Edward C. Jelks

发明人： Edward C. Jelks

IPC分类号： H01L21/205 ,  C23C14/22 ,  C23C14/28 ,  C23C16/04 ,  C23C16/448 ,  C23C16/48 ,  H01J37/32 ,  H01L21/268 ,  B05D3/06

CPC分类号： C23C16/047 ,  C23C14/22 ,  C23C14/28 ,  C23C16/4488 ,  C23C16/483 ,  H01J37/32

摘要： An apparatus and method for depositing a layer of a surface-compatible material from the gas phase onto a selected surface area of a substrate body using a plasma adjacent the substrate body to create a source gas which is decomposed by a laser or other source of energy on the selected surface area. The plasma-generated source gas may be varied by changing targets within the plasma or the reactant gases, and the laser energy may cause decomposition of the source gas by photolysis or pyrolysis or a combination of both.

摘要翻译： 一种用于使用等离子体从衬底主体将气相层沉积到衬底主体的选定表面区域上以产生由激光或其它能源分解的源气体的装置和方法 在选定的表面区域。 等离子体产生的源气体可以通过改变等离子体或反应气体中的目标而变化，并且激光能量可以通过光解或热解或两者的组合引起源气体的分解。

公开(公告)号：US4245333A

公开(公告)日：1981-01-13

申请号：US41114

申请日：1979-05-21

申请人： Edward C. Jelks

发明人： Edward C. Jelks

IPC分类号： G10K11/34 ,  G01S3/84

CPC分类号： G10K11/346

摘要： A beamforming apparatus is provided for processing the outputs of a linearrray of spaced apart receiving elements. The beamforming apparatus includes a surface acoustic wave device which has a pair of transducers mounted on a substrate in a spaced apart relationship. Each transducer is capable of receiving and converting an electrical chirp signal into an acoustic signal for propagation across the surface of the surface acoustical wave device. A plurality of taps are mounted on the substrate in a spaced apart relationship between the pair of transducers for receiving, sharing and converting the acoustic signals back into electric signals. Each tap is adapted to receive a bias voltage. A device is provided for mixing the signal from each tap with a signal from a respective receiving element so as to produce a plurality of mixed output signals, and another device is provided for summing the mixed output signals so as to provide a summed output signal. The summed output signal may then be processed by an upper sideband filter for controlling an indicating device. With this arrangement the beamforming is independent of the center frequency of the array from about 5 KHZ up to the millimeter frequency range.

摘要翻译： 提供了一种用于处理间隔开的接收元件的线性阵列的输出的波束成形装置。 波束形成装置包括表面声波装置，其具有以间隔开的关系安装在基板上的一对换能器。 每个换能器能够接收并将电啁啾信号转换成声信号以在表面声波装置的表面上传播。 多个抽头以一对间隔开的关系安装在基板上，用于接收，共享和将声信号转换回电信号。 每个分接头适于接收偏置电压。 提供了一种用于将来自每个抽头的信号与来自各个接收元件的信号混合以产生多个混合输出信号的装置，并且提供另一个装置用于对混合输出信号求和以提供相加的输出信号。 然后，可以由用于控制指示装置的上边带滤波器来处理相加的输出信号。 利用这种布置，波束成形独立于阵列的中心频率从约5KHZ直到毫米频率范围。

公开(公告)号：US4244037A

公开(公告)日：1981-01-06

申请号：US41113

申请日：1979-05-21

申请人： Edward C. Jelks

发明人： Edward C. Jelks

IPC分类号： G10K11/34 ,  G01S3/84

CPC分类号： G10K11/346

摘要： An apparatus is provided for processing the outputs of a two dimensional nar array of spaced apart receiving elements. The receiving elements are grouped and spaced apart in rows, which may be horizontal and vertical however, the rows may be in other directions provided they lie within a plane. The apparatus includes a plurality of surface acoustic wave (SAW) devices, each SAW device corresponding to a respective horizontal row of receiving elements and being capable of producing a plurality of horizontal phase shift outputs which linearly correspond to the number and horizontal spacing of receiving elements in a respective horizontal row. An additional SAW device is connected to the horizonatal SAW devices for introducing a vertical phase shift factor in the horizontal outputs of each horizontal SAW device so that each SAW device is capable of producing a plurality of combined phase shift outputs, the vertical phase shift factor corresponding linearly to the spacing of the receiving elements in a vertical direction. The apparatus further includes a mixer which corresponds to each horizontal SAW device for mixing the combined phase shift outputs with the respective outputs of the receiving elements in a respective horizontal row so as to produce a plurality of mixed output signals. If desired, the mixed output signals may be summed, processed by an upper sideband filter, and then fed to a video device. With proper controls of the horizontal and vertical scans of the video device two-dimensional imaging can be accomplished for indicating the direction and amplitude distribution of a radiating source with respect to the planar array of listening elements.With the present invention the beamforming is independent of the center frequency of the receiving element array from 5 KHZ up to the millimeter frequency range.

摘要翻译： 提供了一种用于处理间隔开的接收元件的二维平面阵列的输出的装置。 接收元件被分组并以行分隔开，但是它们可以是水平的和垂直的，但是如果它们位于平面内，则这些行可以在其它方向上。 该装置包括多个表面声波（SAW）器件，每个SAW器件对应于相应的水平行的接收元件，并且能够产生多个水平相移输出，其与接收元件的数量和水平间隔线性对应 在相应的水平行。 另外的SAW器件连接到水平SAW器件，用于在每个水平SAW器件的水平输出中引入垂直相移因子，使得每个SAW器件能够产生多个组合相移输出，垂直相移因子对应 在垂直方向上与接收元件的间隔成线性关系。 该装置还包括对应于每个水平SAW器件的混合器，用于将组合的相移输出与各个水平行中的接收元件的相应输出混合，以产生多个混合输出信号。 如果需要，可以将混合输出信号相加，由上边带滤波器处理，然后馈送到视频设备。 通过对视频设备的水平和垂直扫描的适当控制，可以实现二维成像，用于指示辐射源相对于倾听单元的平面阵列的方向和幅度分布。 利用本发明，波束形成独立于接收元件阵列的从5KHZ到毫米频率范围的中心频率。

公开(公告)号：US4194171A

公开(公告)日：1980-03-18

申请号：US922610

申请日：1978-07-07

申请人： Edward C. Jelks

发明人： Edward C. Jelks

IPC分类号： G06G7/195 ,  H03H3/08 ,  H03H9/02 ,  H03H7/30

CPC分类号： H03H9/02574 ,  G06G7/195 ,  H03H3/08 ,  H03H9/02866 ,  H03H9/02976

摘要： A material suitable for the propagation of acoustic waves on its surface prises a substrate of semiconductor material, of which there exists an oxide, excluding the class of piezoelectric materials, the substrate having at least one flat surface. A layer of thermally grown oxide of the semiconductor material, is disposed on the flat surface. A film of titanium, approximately 300 angstroms thick, is disposed on at least a part of the layer of oxide. A layer of vacuum-deposited metal is disposed on the film of titanium. A layer of a piezoelectrid vacuum-sputtered material is on the layer of vacuum-deposited metal and on the oxide. The semiconductor material may be silicon, the oxide may be silicon dioxide, the piezoelectric material may be zinc oxide, and the metal may be gold. The material further comprises an interdigitated electrode structure disposed upon the piezoelectric material, which, when an electrical signal is applied to it, can cause propagation of a surface acoustic wave (SAW) upon the surface of the piezoelectric material, the combination comprising a SAW transducer.

摘要翻译： 适合于在其表面上传播声波的材料包括半导体材料的衬底，其中存在氧化物，不包括一类压电材料，衬底具有至少一个平坦表面。 半导体材料的热生长氧化物层设置在平坦表面上。 大约300埃厚的钛薄膜被设置在氧化物层的至少一部分上。 在钛膜上设置真空沉积金属层。 一层压电真空溅射材料在真空沉积金属层和氧化物上。 半导体材料可以是硅，氧化物可以是二氧化硅，压电材料可以是氧化锌，金属可以是金。 所述材料还包括设置在所述压电材料上的叉指电极结构，当施加电信号时，能够使表面声波（SAW）在所述压电材料的表面上传播，所述组合包括SAW换能器 。

公开(公告)号：US4414738A

公开(公告)日：1983-11-15

申请号：US230246

申请日：1981-02-02

申请人： Edward C. Jelks ,  George L. Kerber ,  Howard A. Wilcox

发明人： Edward C. Jelks ,  George L. Kerber ,  Howard A. Wilcox

IPC分类号： H01L21/027 ,  H01L39/24 ,  H01L39/22

CPC分类号： H01L21/0272 ,  H01L39/2493 ,  Y10S438/944 ,  Y10S505/922

摘要： Planar superconducting-normal-superconducting (SNS) Josephson microbridgesnd superconducting quantum interference devices (SQUIDs) with bridge widths of about 0.2 microns and lengths of about 0.1 micron or less are fabricated with the aid of a technique referred to as "shadow evaporation". The procedure permits the submicron dimensions to be set by edge film thickness and slant evaporation angle, both of which can be accurately measured. Microbridges have been constructed with vanadium banks or electrodes and gold-titanium bridges, although other materials can be used including superconducting metals for the bridge. It is expected that a refined version of this technique would be suitable for repeated batch fabrication of single and multiple Josephson microbridges.

摘要翻译： 借助于称为“阴影蒸发”的技术，制造具有约0.2微米的桥宽度和约0.1微米或更小的长度的平面超导正常超导（SNS）约瑟夫逊微桥和超导量子干涉装置（SQUID）。 该过程允许通过边缘膜厚度和倾斜蒸发角设置亚微米尺寸，这两者都可以被精确测量。 虽然可以使用其他材料，包括用于桥梁的超导金属，但是已经用钒堤或电极和金 - 钛桥构建了微桥。 预计这种技术的精简版本将适用于单个和多个约瑟夫逊微桥的重复批量制造。

公开(公告)号：US4409262A

公开(公告)日：1983-10-11

申请号：US344341

申请日：1982-02-01

申请人： Edward C. Jelks ,  George L. Kerber

发明人： Edward C. Jelks ,  George L. Kerber

IPC分类号： G03F7/00 ,  H01L21/027 ,  B05D5/12

CPC分类号： H01L21/0272 ,  G03F7/0035

摘要： A method of fabricating lines of submicron width, comprising the steps of:providing a substrate,depositing a first layer of metal upon the substrate;spinning a photoresist layer on the metal;patterning the photoresist layer;etching the metal to undercut the photoresist edge, e.g. with a mixture for approximately ten minutes at room temperature;depositing a second layer of metal at an angle .theta..sub.1 to the photoresist edge, thereby defining a long, submicron-wide opening to the underlying substrate;depositing a chosen material, for example, metallic or semiconductor, for the bridge onto the substrate at an angle of .theta..sub.2 through the submicron-wide opening; andremoving undesired material surrounding the bridge by dissolving the photoresist in hot acetone followed by stripping the remaining two layers of metal with etchant.

摘要翻译： 一种制造亚微米宽度线的方法，包括以下步骤：提供衬底，在衬底上沉积第一金属层; 在金属上旋转光致抗蚀剂层; 图案化光致抗蚀剂层; 蚀刻金属以蚀刻光致抗蚀剂边缘，例如， 在室温下混合约10分钟; 将第二层金属以角度θ1沉积到光致抗蚀剂边缘，从而为下面的基底限定长的亚微米宽的开口; 将所选择的材料（例如金属或半导体）以角度θ2穿过亚微米宽的开口沉积到衬底上; 并通过将光致抗蚀剂溶解在热丙酮中，然后用蚀刻剂剥离剩余的两层金属来除去桥周围的不需要的材料。

公开(公告)号：US4278710A

公开(公告)日：1981-07-14

申请号：US69654

申请日：1979-08-27

申请人： Edward C. Jelks

发明人： Edward C. Jelks

IPC分类号： C23C14/04 ,  C23C11/00 ,  C23C13/00

CPC分类号： C23C14/042

摘要： An apparatus and method are provided for depositing submicron patterns on a substrate. The apparatus includes an evaporative source located opposite the substrate so that molecules from the source can be deposited directly on the substrate. A mask is located between the evaporative source and the substrate, the mask having openings which correspond to the desired pattern to be deposited on the substrate. A plate is located between the mask and the substrate, the plate having an aperture for allowing evaporated molecules to be deposited on the substrate according to the pattern of the mask.

摘要翻译： 提供了一种用于在衬底上沉积亚微米图案的装置和方法。 该装置包括位于衬底相对的蒸发源，使得来自源的分子可以直接沉积在衬底上。 掩模位于蒸发源和衬底之间，掩模具有对应于要沉积在衬底上的期望图案的开口。 板位于掩模和基板之间，板具有用于根据掩模的图案使蒸发的分子沉积在基板上的孔。