发明授权
- 专利标题: Family of compounds crosslinkable by photon irradiation
- 专利标题(中): 通过光子照射可交联的化合物族
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申请号: US318940申请日: 1981-11-06
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公开(公告)号: US4414081A公开(公告)日: 1983-11-08
- 发明人: Armand Eranian , Jean-Claude Dubois , Maryse Gazard , Francoise Barre
- 申请人: Armand Eranian , Jean-Claude Dubois , Maryse Gazard , Francoise Barre
- 申请人地址: FRX Paris
- 专利权人: Thomson - CSF
- 当前专利权人: Thomson - CSF
- 当前专利权人地址: FRX Paris
- 优先权: FRX7706441 19770304
- 主分类号: C08L33/02
- IPC分类号: C08L33/02 ; C08F2/50 ; C08F20/00 ; C08F20/38 ; C08F220/38 ; C08J3/28 ; C08K5/23 ; C08L33/00 ; C08L33/04 ; G03F7/021 ; G03F7/027 ; G03F7/029 ; G03F7/038 ; H01L21/027 ; H01L21/302 ; H01L21/3065
摘要:
A family of negative resins, capable of undergoing crosslinking under the effect of more or less energetic photons (gamma radiation, X-rays, ultraviolet or visible light), applicable to the protection of objects against atmospheric agents and to the production of masks of the type used in the production of integrated circuits. The typical compound according to the invention contains at least one substance of which the chemical formula comprises a thiirane ring: ##STR1## such as 2,3-epithiopropyl methacrylate copolymerized with a vinyl monomer, such as methyl methacrylate. Crosslinking is facilitated by photoinitiators, such as aryl diazonium and aryl iodonium salts liberating Lewis acids. By selecting the photoinitiator, it is possible to act on the spectral region where irradiation is effective.
公开/授权文献
- US5457424A Quadrature demodulator operable over different IF frequencies 公开/授权日:1995-10-10
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