发明授权
- 专利标题: Method for selective electroless plating of copper onto a non-conductive substrate surface
- 专利标题(中): 铜在非导电基材表面上的选择性化学镀电镀方法
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申请号: US540600申请日: 1983-10-11
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公开(公告)号: US4448804A公开(公告)日: 1984-05-15
- 发明人: William J. Amelio , Gary K. Lemon , Voya Markovich , Theodore Panasik , Carlos J. Sambucetti , Donna J. Trevitt
- 申请人: William J. Amelio , Gary K. Lemon , Voya Markovich , Theodore Panasik , Carlos J. Sambucetti , Donna J. Trevitt
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: C23C18/16
- IPC分类号: C23C18/16 ; C23C18/40 ; C23C18/52 ; H05K3/18 ; H05K3/38 ; B05D5/12 ; B05D1/32 ; B05D3/04 ; C23F1/00
摘要:
Multistep process for electroless plating of copper onto a non-conductive surface including the steps of: (1) laminating a rough copper sheet onto the non-conductive surface; (2) etching away all the copper; (3) conditioning the surface with multifunctional positively charged molecules derived from copolymers of polyacrylamide and functionally active tetraalkylammonium compounds in an diluted inorganic acid; (4) activating the conditioned surface preferably with stannous/palladium chloride particles; (5) treating the activated surface with deionized water and diluted HCl; (6) applying a photoresist layer to the surface and selectively exposing and developing the photoresist to produce a mask corresponding to the negative of the desired circuit pattern; and (7) plating copper using successively two baths differing in their oxygen and CN.sup.- concentration, where the foregoing steps are interspersed with washing steps.
公开/授权文献
- US5037326A Sealed grommet mounting for lamp socket 公开/授权日:1991-08-06
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