发明授权
- 专利标题： Electron-beam image transfer device
- 专利标题（中）： 电子束图像传输装置
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申请号： US379712申请日： 1982-05-18
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公开(公告)号： US4467210A公开(公告)日： 1984-08-21
- 发明人: Kazuyoshi Sugihara , Toru Tojo , Ichiro Mori , Toshiaki Shinozaki
- 申请人： Kazuyoshi Sugihara , Toru Tojo , Ichiro Mori , Toshiaki Shinozaki
- 申请人地址： JPX Kawasaki
- 专利权人： Tokyo Shibaura Denki Kabushiki Kaisha
- 当前专利权人： Tokyo Shibaura Denki Kabushiki Kaisha
- 当前专利权人地址： JPX Kawasaki
- 优先权： JPX56-79563 19820526
- 主分类号： H01L21/027
- IPC分类号： H01L21/027 ; B65G49/07 ; H01J37/18 ; H01L21/30 ; H01L21/677 ; H01L21/68 ; B23Q3/157
摘要：
An electron-beam image transfer device includes an evacuated vessel having a main chamber and spare chamber extended therefrom and a specimen holder and mask holder disposed in the main chamber. A subchamber is formed near the spare chamber to house a specimen. The specimen in the subchamber is transferred to the spare chamber by a movable support through an opening which is always kept in an airtight state, and then brought to the specimen holder by a transferring mechanism.
公开/授权文献
- US5546319A Method of and system for charged particle beam exposure 公开/授权日：1996-08-13