发明授权
US4563610A Device for generating negative-ion beams by alkaline metal ion sputtering
失效
用碱金属离子溅射法生成负离子束的装置
- 专利标题: Device for generating negative-ion beams by alkaline metal ion sputtering
- 专利标题(中): 用碱金属离子溅射法生成负离子束的装置
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申请号: US477971申请日: 1983-03-23
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公开(公告)号: US4563610A公开(公告)日: 1986-01-07
- 发明人: Toshinori Takagi , Junzo Ishikawa , Koji Matsuda
- 申请人: Toshinori Takagi , Junzo Ishikawa , Koji Matsuda
- 申请人地址: JPX Kyoto
- 专利权人: Nissin-High Voltage Co., Ltd.
- 当前专利权人: Nissin-High Voltage Co., Ltd.
- 当前专利权人地址: JPX Kyoto
- 优先权: JPX57-223221 19821220
- 主分类号: C23C14/48
- IPC分类号: C23C14/48 ; H01J27/02 ; H01J27/20 ; H01J37/08 ; H01J27/22 ; H01J49/14 ; H05H1/24
摘要:
A negative-ion source comprising means for discharging alkaline metal for discharging neutral alkaline metal particles together with alkaline metal ion particles; an electrode for generating negative ions which can serve as an extraction electrode for extracting said alkaline metal ion particles and a target bombarded with said alkaline metal ion particles and which provides with a hold for holding negative-ion seed material in the portion bombarded with said alkaline metal ion particles and an aperture for letting out negative-ion particles; and a negative-ion extraction electrode for said negative-ion particles. The present negative-ion source has an improved ion current efficiency and is compact size.
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