发明授权
US4571541A Method for determining charged energy states of semiconductor or
insulator materials by using deep level transient spectroscopy, and an
apparatus for carrying out the method
失效
通过使用深层瞬态光谱法确定半导体或绝缘体材料的带电能态的方法,以及用于执行该方法的装置
- 专利标题: Method for determining charged energy states of semiconductor or insulator materials by using deep level transient spectroscopy, and an apparatus for carrying out the method
- 专利标题(中): 通过使用深层瞬态光谱法确定半导体或绝缘体材料的带电能态的方法,以及用于执行该方法的装置
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申请号: US439226申请日: 1982-11-04
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公开(公告)号: US4571541A公开(公告)日: 1986-02-18
- 发明人: Gyorgy Ferenczi , Janos Boda , Ferenc Toth , Peter Horvath , Laszlo Benkovics , Laszlo Dozsa
- 申请人: Gyorgy Ferenczi , Janos Boda , Ferenc Toth , Peter Horvath , Laszlo Benkovics , Laszlo Dozsa
- 申请人地址: HUX Budapest
- 专利权人: Magyar Tudomanyos Akademia Muszaki Fizikai Kutato Intezete
- 当前专利权人: Magyar Tudomanyos Akademia Muszaki Fizikai Kutato Intezete
- 当前专利权人地址: HUX Budapest
- 优先权: HUX3342/81 19811109
- 主分类号: G01N27/00
- IPC分类号: G01N27/00 ; G01R31/26 ; G01R31/28 ; H01L21/66
摘要:
A method for determining charged energy states of a sample of a semiconductor or insulator material by using deep level transient spectroscopy. The method includes the steps of exciting the sample by application of periodical exciting pulses to change the initial charge state, detecting the transient response of the sample when it returns to the thermodynamical balance condition following the termination of each of the excitation pulses, blocking the detection during a blocking period defined as the combined existence of the exciting pulses and of a dead period including the recovery period of the means used for the detection, performing a weighted integration operation on a detected response signal by the application of a symmetrical square wave synchronizing pulse as a weighting function synchronized to the frequency of said exciting pulses, blocking the detection in each of said detecting periods for the duration of a further blocking period which begins in a moment defined between the starting moments of the two exciting pulses immediately preceding and following said detecting period and synchronizing the synchronizing pulses to terminating moments of said dead periods to have a period time which is equal to the period time of said periodical exciting pulses. Apparatus for carrying out the method is also disclosed.
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