发明授权
- 专利标题: Process of making and using a positive working photosensitive film resist material
- 专利标题(中): 制造和使用正性感光膜抗蚀剂材料的工艺
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申请号: US678050申请日: 1984-12-04
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公开(公告)号: US4576902A公开(公告)日: 1986-03-18
- 发明人: Dietrich Saenger , Helmut Barzynski
- 申请人: Dietrich Saenger , Helmut Barzynski
- 专利权人: BASF SE
- 当前专利权人: BASF SE
- 优先权: DEX2922746 19790605
- 主分类号: G03C1/72
- IPC分类号: G03C1/72 ; G03F7/004 ; G03F7/038 ; G03F7/039 ; G03F7/16 ; H01L21/027 ; G03C5/00
摘要:
A positive working photosensitive film resist material suitable for multiple image-wise exposure comprises, on a dimensionally stable base film, a photosensitive coating which contains (a) a polymer which possesses aromatic or hetero-aromatic o-nitrocarbinol ester groups (for example o-nitrobenzyl acrylate units) and which can be washed out, after exposure, with an alkaline solvent, and (b) a transparent plasticizer compatible with (a). The product may be used as photopolymer dry film resist material in the production of electrical conductor boards, chemically milled fine-line parts, and identification plates.
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