发明授权
- 专利标题: Detecting thermal waves to evaluate thermal parameters
- 专利标题(中): 检测热波来评估热参数
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申请号: US612075申请日: 1984-05-21
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公开(公告)号: US4579463A公开(公告)日: 1986-04-01
- 发明人: Allan Rosencwaig , Jon Opsal , Walter L. Smith , David L. Willenborg
- 申请人: Allan Rosencwaig , Jon Opsal , Walter L. Smith , David L. Willenborg
- 申请人地址: CA Fremont
- 专利权人: Therma-Wave Partners
- 当前专利权人: Therma-Wave Partners
- 当前专利权人地址: CA Fremont
- 主分类号: G01J5/00
- IPC分类号: G01J5/00 ; G01N21/01 ; G01N21/17 ; G01N21/55 ; G01N25/00 ; G01N25/72 ; G01N29/00 ; G01N21/41
摘要:
A method and apparatus is disclosed for detecting thermal waves. This system is based on the measurement of the change in reflectivity at the sample surface which is a function of the changing surface temperature. The apparatus includes a radiation probe beam that is directed on a portion of the area which is being periodically heated. A photodetector is aligned to sense the intensity changes in the reflected radiation probe beam which results from the periodic heating. These signals are processed to detect the presence of thermal waves.
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