公开(公告)号：US4579463A

公开(公告)日：1986-04-01

申请号：US612075

申请日：1984-05-21

申请人： Allan Rosencwaig ,  Jon Opsal ,  Walter L. Smith ,  David L. Willenborg

发明人： Allan Rosencwaig ,  Jon Opsal ,  Walter L. Smith ,  David L. Willenborg

IPC分类号： G01J5/00 ,  G01N21/01 ,  G01N21/17 ,  G01N21/55 ,  G01N25/00 ,  G01N25/72 ,  G01N29/00 ,  G01N21/41

CPC分类号： G01N21/55 ,  G01N25/00 ,  G01N25/72

摘要： A method and apparatus is disclosed for detecting thermal waves. This system is based on the measurement of the change in reflectivity at the sample surface which is a function of the changing surface temperature. The apparatus includes a radiation probe beam that is directed on a portion of the area which is being periodically heated. A photodetector is aligned to sense the intensity changes in the reflected radiation probe beam which results from the periodic heating. These signals are processed to detect the presence of thermal waves.

摘要翻译： 公开了一种用于检测热波的方法和装置。 该系统基于样品表面的反射率变化的测量，该变化是表面温度变化的函数。 该装置包括一个辐射探针光束，该辐射探针光束被定向在正被周期性地加热的区域的一部分上。 对准光电检测器以感测由周期性加热产生的反射辐射探针光束的强度变化。 处理这些信号以检测热波的存在。

公开(公告)号：US5042952A

公开(公告)日：1991-08-27

申请号：US550333

申请日：1990-07-09

申请人： Jon Opsal ,  Allan Rosencwaig ,  Walter L. Smith

发明人： Jon Opsal ,  Allan Rosencwaig ,  Walter L. Smith

IPC分类号： G01N21/17 ,  G01R31/265

CPC分类号： G01N21/171 ,  G01R31/2656

摘要： A method and apparatus are disclosed for evaluating surface and subsurface features in a semiconductor sample. In operation, a periodic energy source is applied to the surface of the semiconductor sample to generate a periodic electron-hole plasma. This plasma interacts with features in the sample as it diffuses. The plasma affects the index of refraction of the sample and the changing plasma density is monitored using a radiation probe. In the preferred embodiment, the radiation probe measures the plasma induced periodic changes of reflectivity of the surface of the sample to yield information about the sample, such as ion dopant concentrations, residue deposits and defects.

摘要翻译： 公开了一种用于评估半导体样品中的表面和地下特征的方法和装置。 在操作中，将周期性能量源施加到半导体样品的表面以产生周期性电子空穴等离子体。 这种等离子体在扩散时与样品中的特征相互作用。 等离子体影响样品的折射率，并且使用辐射探针监测改变的等离子体密度。 在优选实施例中，辐射探针测量等离子体诱导的样品表面的反射率的周期性变化，以产生关于样品的信息，例如离子掺杂剂浓度，残余物沉积物和缺陷。

公开(公告)号：US4952063A

公开(公告)日：1990-08-28

申请号：US351540

申请日：1989-05-15

申请人： Jon Opsal ,  Allan Rosencwaig ,  Walter L. Smith

发明人： Jon Opsal ,  Allan Rosencwaig ,  Walter L. Smith

IPC分类号： G01N21/17 ,  G01R31/265

CPC分类号： G01N21/171 ,  G01R31/2656

摘要： A method and apparatus are disclosed for evaluating surface and subsurface features in a semiconductor sample. In operation, a periodic energy source is applied to the surface of the semiconductor sample to generate a periodic electron-hole plasma. This plasma interacts with features in the sample as it diffuses. The plasma affects the index of refraction of the sample and the changing plasma density is monitored using a radiation probe. In the preferred embodiment, the radiation probe measures the plasma induced periodic changes of reflectivity of the surface of the sample to yield information about the sample, such as ion dopant concentrations, residue deposits and defects.

摘要翻译： 公开了一种用于评估半导体样品中的表面和地下特征的方法和装置。 在操作中，将周期性能量源施加到半导体样品的表面以产生周期性电子空穴等离子体。 这种等离子体在扩散时与样品中的特征相互作用。 等离子体影响样品的折射率，并且使用辐射探针监测改变的等离子体密度。 在优选实施例中，辐射探针测量等离子体诱导的样品表面的反射率的周期性变化，以产生关于样品的信息，例如离子掺杂剂浓度，残余物沉积物和缺陷。

公开(公告)号：US4854710A

公开(公告)日：1989-08-08

申请号：US76876

申请日：1987-07-23

申请人： Jon Opsal ,  Allan Rosencwaig ,  Walter L. Smith

发明人： Jon Opsal ,  Allan Rosencwaig ,  Walter L. Smith

IPC分类号： G01N23/203 ,  G01N21/17 ,  G01R31/265

CPC分类号： G01R31/2656 ,  G01N21/171

摘要： A method and apparatus are disclosed for evaluating surface and subsurface features in a semiconductor sample. In operation, a periodic energy source is applied to the surface of the semiconductor sample to generate a periodic electron-hole plasma. This plasma interacts with features in the sample as it diffuses. The plasma affects the index of refraction of the sample and the changing plasma density is monitored using a radiation probe. In the preferred embodiment, the radiation probe measures the plasma induced periodic changes of reflectivity of the surface of the sample to yield information about the sample, such as ion dopant concentrations, residue deposits and defects.

摘要翻译： 公开了一种用于评估半导体样品中的表面和地下特征的方法和装置。 在操作中，将周期性能量源施加到半导体样品的表面以产生周期性电子空穴等离子体。 这种等离子体在扩散时与样品中的特征相互作用。 等离子体影响样品的折射率，并且使用辐射探针监测改变的等离子体密度。 在优选实施例中，辐射探针测量等离子体诱导的样品表面的反射率的周期性变化，以产生关于样品的信息，例如离子掺杂剂浓度残余物沉积物和缺陷。

公开(公告)号：US4750822A

公开(公告)日：1988-06-14

申请号：US845606

申请日：1986-03-28

申请人： Allan Rosencwaig ,  Jon Opsal ,  Walter L. Smith

发明人： Allan Rosencwaig ,  Jon Opsal ,  Walter L. Smith

IPC分类号： G01B11/30 ,  G01N21/17 ,  G01N21/21 ,  G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  G01N21/41

CPC分类号： G01N21/88 ,  G01N21/17 ,  G01N2021/1744 ,  G01N2021/178 ,  G01N2021/1789 ,  G01N21/21 ,  G01N21/4738

摘要： A method and apparatus is disclosed for detecting defect surface states in any material and in particular semiconductors. In the subject device, a periodic localized excitation is generated at the surface of the sample with an intensity modulated pump laser beam. A probe laser beam is directed to the surface of the sample and changes in the probe beam which are in phase with the modulated pump frequency are detected. In the preferred embodiment, periodic changes in the optical reflectivity of the surface of the sample induced by an intensity modulated excitation beam are detected by measuring the corresponding modulations in the reflected power of the probe beam. Any time dependence of the probe beam modulated reflectance signal is monitored. An evaluation of defect surface states is then made by investigating the time dependence of the magnitude and/or phase of this probe beam modulated reflectance signal.

摘要翻译： 公开了用于检测任何材料，特别是半导体中的缺陷表面状态的方法和装置。 在本装置中，在强度调制的泵浦激光束的样品表面产生周期性局部激发。 探针激光束被引导到样品的表面，并且检测到与调制的泵频率同相的探针光束的变化。 在优选实施例中，通过测量探针光束的反射功率的相应调制来检测由强度调制的激发光束引起的样品的表面的光学反射率的周期性变化。 监测探测光束调制反射信号的任何时间依赖性。 然后通过研究该探测光束调制反射信号的幅度和/或相位的时间依赖性来进行缺陷表面状态的评估。

公开(公告)号：US4636088A

公开(公告)日：1987-01-13

申请号：US612076

申请日：1984-05-21

申请人： Allan Rosencwaig ,  Walter L. Smith

发明人： Allan Rosencwaig ,  Walter L. Smith

IPC分类号： G01N21/00 ,  G01N21/17 ,  G01N21/55 ,  G01N21/41 ,  G01N25/00

CPC分类号： G01N21/171

摘要： An apparatus and method is disclosed for evaluating surface conditions on a sample. The system is particularly suited for detecting thin residues encountered in semiconductor lithographic and etching processes. The system is also capable of measuring ion implanted dopant concentrations prior to annealing. The apparatus includes an intensity modulated laser beam which is focused on the surface of the sample to generate periodic heating. A second light beam is focused onto the periodically heated area of the sample in a manner such that it is reflected to a detector. The intensity changes in the probe beam, resulting from the temperature induced changes of reflectivity at the surface of the sample, are measured and evaluated to determine the absence or presence of residues, or to measure the concentrations of ion implanted dopants.

摘要翻译： 公开了一种用于评估样品上的表面状况的装置和方法。 该系统特别适用于检测半导体光刻和蚀刻工艺中遇到的薄残留物。 该系统还能够在退火之前测量离子注入的掺杂剂浓度。 该装置包括强度调制的激光束，其聚焦在样品的表面上以产生周期性加热。 第二光束以使得其被反射到检测器的方式聚焦在样品的周期性加热区域上。 测量和评估由温度引起的样品表面反射率变化导致的探针光束强度变化，以评估残留物的不存在或存在，或测量离子注入掺杂剂的浓度。

公开(公告)号：US5228776A

公开(公告)日：1993-07-20

申请号：US879760

申请日：1992-05-06

申请人： Walter L. Smith ,  Clifford G. Wells ,  Allan Rosencwaig

发明人： Walter L. Smith ,  Clifford G. Wells ,  Allan Rosencwaig

IPC分类号： G01N25/72

CPC分类号： G01N25/72

摘要： An apparatus is disclosed for evaluating thermal and electrical characteristics of a sample. An intensity modulated pump beam is focused onto the surface of a sample at one spot. A non-modulated probe beam is focused onto the sample at a second spot, spaced laterally and vertically from the first spot. The distance between the two spots is at least two microns. The modulated power of the reflected probe beam that is in phase with the pump beam modulation frequency is monitored to provide information about the characteristics of the sample. The apparatus is particularly useful in evaluating the integrity of metal lines and vias in a semiconductor sample.

摘要翻译： 公开了一种用于评估样品的热和电特性的装置。 强度调制泵浦光束在一个点聚焦在样品的表面上。 未调制探测光束在第二光点聚焦在样品上，与第一光斑横向和垂直间隔。 两个点之间的距离至少为2微米。 监测与泵浦光束调制频率同相的反射探测光束的调制功率，以提供有关样品特性的信息。 该装置在评估半导体样品中金属线和通孔的完整性方面特别有用。

公开(公告)号：US11944779B2

公开(公告)日：2024-04-02

申请号：US17073743

申请日：2020-10-19

申请人： Walter L. Smith

发明人： Walter L. Smith

IPC分类号： A61M5/14

CPC分类号： A61M5/1417 ,  A61M5/1415 ,  A61M5/1418 ,  A61M2205/587 ,  A61M2209/082 ,  A61M2209/084

摘要： An intravenous fluid bag supporting assembly includes a mobile base having a plurality of wheels, a telescoping pole having a lower end connected with the base and an inverted polyhedron structure connected with an upper end of the pole and configured to receive at least one intravenous fluid bag. An adjustable light assembly is arranged on the pole in spaced relation between the inverted polyhedron structure and the base. A support platform is arranged on the pole in spaced relation between the light assembly and the base, the support platform supporting a plurality of housings configured to receive a plurality of displays and pumps or other medical instruments, respectively. A hang grip and basket are also arranged on the pole.

公开(公告)号：US20220118175A1

公开(公告)日：2022-04-21

申请号：US17073743

申请日：2020-10-19

申请人： Walter L. Smith

发明人： Walter L. Smith

IPC分类号： A61M5/14

摘要： An intravenous fluid bag supporting assembly includes a mobile base having a plurality of wheels, a telescoping pole having a lower end connected with the base and an inverted polyhedron structure connected with an upper end of the pole and configured to receive at least one intravenous fluid bag. An adjustable light assembly is arranged on the pole in spaced relation between the inverted polyhedron structure and the base. A support platform is arranged on the pole in spaced relation between the light assembly and the base, the support platform supporting a plurality of housings configured to receive a plurality of displays and pumps or other medical instruments, respectively. A hang grip and basket are also arranged on the pole.

公开(公告)号：US06993707B2

公开(公告)日：2006-01-31

申请号：US10710849

申请日：2004-08-06

申请人： David Baker ,  Walter L. Smith

发明人： David Baker ,  Walter L. Smith

IPC分类号： G06F17/21

CPC分类号： G06F17/30884 ,  G06F17/2247

摘要： A method of saving and retrieving a selected string on an HTML-based document. A cursor is placed at a location on the document. The number of HTML tags are counted between the beginning of the document and the position of the cursor. The count of HTML tags is saved in association with the URL of the document. When the document at the URL is retrieved at a later time, the string at the location of the previously set cursor is retrieved and communicated to the end user.

摘要翻译： 一种在基于HTML的文档上保存和检索所选字符串的方法。 光标放在文档的某个位置。 HTML标签的数量在文档的开头和光标的位置之间进行计数。 HTML标签的数量与文档的URL相关联地保存。 当URL稍后检索文档时，将检索先前设置的光标位置的字符串并传送给最终用户。