发明授权
- 专利标题： Position detecting system
- 专利标题（中）： 位置检测系统
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申请号： US333295申请日： 1981-12-22
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公开(公告)号： US4589773A公开(公告)日： 1986-05-20
- 发明人: Satoshi Ido , Minpei Fujinami , Yasuo Kato , Yoshio Sakitani , Susumu Ozasa
- 申请人： Satoshi Ido , Minpei Fujinami , Yasuo Kato , Yoshio Sakitani , Susumu Ozasa
- 申请人地址： JPX Tokyo JPX Tokyo
- 专利权人： Nippon Telegraph & Telephone Public Corporation,Hitachi, Ltd.
- 当前专利权人： Nippon Telegraph & Telephone Public Corporation,Hitachi, Ltd.
- 当前专利权人地址： JPX Tokyo JPX Tokyo
- 优先权： JPX56-24329 19810223
- 主分类号： G03B27/34
- IPC分类号： G03B27/34 ; G01B11/00 ; G01B11/02 ; G01C3/06 ; H01L21/027 ; H01L21/30 ; G01B15/00
摘要：
A position detecting system suitable for the position control of the surface of a workpiece mounted in an electron beam exposure system is disclosed which includes an electrically-driven light source, a first optical system for focusing a light beam from the light source on a workpiece, a position-controlling table for mounting thereon the workpiece, a second optical system for focusing light reflected from the workpiece on a predetermined image surface, a photodetector having a light receiving surface arranged on the image surface, and a negative feedback amplifier for controlling the light source by the output of the photodetector.
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