发明授权
- 专利标题: Method of forming a layer of thin film on a substrate having a multiplicity of mesh-like holes
- 专利标题(中): 在具有多个网状孔的基板上形成薄膜层的方法
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申请号: US649858申请日: 1984-09-12
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公开(公告)号: US4601922A公开(公告)日: 1986-07-22
- 发明人: Yasuo Moroboshi , Akira Nishiwaki
- 申请人: Yasuo Moroboshi , Akira Nishiwaki
- 申请人地址: JPX Tokyo
- 专利权人: Konishiroku Photo Industry Co., Ltd.
- 当前专利权人: Konishiroku Photo Industry Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX58-174769 19830921; JPX58-174770 19830921; JPX58-174771 19830921; JPX58-174772 19830921; JPX58-174773 19830921; JPX58-174774 19830921
- 主分类号: C23C14/04
- IPC分类号: C23C14/04 ; C23C14/24 ; G03G5/12 ; C23C16/00
摘要:
A method of forming a thin layer on a substrate by vapor deposition wherein particles of the material to be constituted the thin layer are caused to fly in such a direction that they reach the surface of the substrate at substantially a right angle relative to the latter. The substrate is located opposite to a particle generating source. A shield device with a slit is provided in the proximity of the substrate located opposite to the particle generating source and between the substrate and the particle generating source so that they are introduced onto the surface of the substrate through the slit at substantially a right angle relative to the surface of the substrate.
公开/授权文献
- US5780186A High performance zinc anode for battery applications 公开/授权日:1998-07-14
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