发明授权
- 专利标题： Precise movement device
- 专利标题（中）： 精密移动装置
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申请号： US681590申请日： 1984-12-14
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公开(公告)号： US4615515A公开(公告)日： 1986-10-07
- 发明人: Mikio Suzuta , Hironori Yamamoto , Kazuo Nakazawa
- 申请人： Mikio Suzuta , Hironori Yamamoto , Kazuo Nakazawa
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX58-250550 19831227
- 主分类号： H01L21/30
- IPC分类号： H01L21/30 ; B23Q1/26 ; B23Q1/28 ; G03F7/20 ; G03F9/00 ; G12B3/08 ; G12B5/00 ; H01L21/027 ; H01L21/67 ; H01L21/68 ; B25B1/22
摘要：
A precise movement device of the type for guiding a movable member with hydrostatic pressure or a magnetic field and moving the movable member substantially without a friction. The device includes a mechanism for supporting the movable member by the use of hydrostatic pressure or a magnetic field and for guiding the movement of the movable member, and includes a mechanism for generating a resistance against the movement of the movable member when the movable member is to be stopped, such that the movable member can be stopped at a desired position accurately and in a reduced time.