发明授权
- 专利标题: Pressure sensor
- 专利标题(中): 压力传感器
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申请号: US785909申请日: 1985-10-09
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公开(公告)号: US4628740A公开(公告)日: 1986-12-16
- 发明人: Toshitsugu Ueda , Fusao Kohsaka , Yoshinobu Sugihara
- 申请人: Toshitsugu Ueda , Fusao Kohsaka , Yoshinobu Sugihara
- 申请人地址: JPX Tokyo
- 专利权人: Yokogawa Hokushin Electric Corporation
- 当前专利权人: Yokogawa Hokushin Electric Corporation
- 当前专利权人地址: JPX Tokyo
- 主分类号: G01L7/00
- IPC分类号: G01L7/00 ; G01L9/00 ; G01L11/02 ; G01L13/06 ; G01N21/37 ; G01L9/04 ; G01L9/12
摘要:
A pressure sensor which detects delicate changes in pressure as small as 0.01 .mu.m water column by detecting displacement or torque in a movable plate. The sensor comprises a fixed plate in which slits are formed, a movable plate on which pressure to be measured is impressed, a supporting member which supports the movable plate at two points on a straight line passing through its center of gravity so as to enable the movable plate to rotate thereabout, and a detecting means for detecting displacement or torque in the movable plate. The different pressures act on the movable plate to cause the rotation thereof and the displacement or torque so that such displacement corresponds to the pressure difference.