发明授权
- 专利标题： Electrostatically sealed piezoelectric device
- 专利标题（中）： 静电密封压电器件
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申请号： US750455申请日： 1985-07-01
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公开(公告)号： US4639631A公开(公告)日： 1987-01-27
- 发明人: Marc K. Chason , Carl A. Kotecki , Joseph P. Tomase , Michael J. Onystok , Donald J. Ryback , Robert G. Kinsman , Lawrence N. Dworsky , Kenneth J. Nield , Steven C. Moore
- 申请人： Marc K. Chason , Carl A. Kotecki , Joseph P. Tomase , Michael J. Onystok , Donald J. Ryback , Robert G. Kinsman , Lawrence N. Dworsky , Kenneth J. Nield , Steven C. Moore
- 申请人地址： IL Schaumburg
- 专利权人： Motorola, Inc.
- 当前专利权人： Motorola, Inc.
- 当前专利权人地址： IL Schaumburg
- 主分类号： H03H9/02
- IPC分类号： H03H9/02 ; H01L41/053 ; H03H9/10 ; H01L41/08
摘要：
A piezoelectric device package consists of a base and a cover which are sealed together to hermetically seal a piezoelectric device such as a quartz crystal therebetween. A recess in the cover receives the quartz crystal. Feedthrough holes in the base, or the cover, or both, which have electrostatic seals formed over them provide a means for making electrical connections with the quartz wafer while still maintaining the hermetic seal.
公开/授权文献
- US5716431A Device for separating extremely fine particles from air 公开/授权日：1998-02-10
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