发明授权
- 专利标题： Method of making a piezoelectric shear wave resonator
- 专利标题（中）： 制造压电剪切波谐振器的方法
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申请号： US736164申请日： 1985-05-20
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公开(公告)号： US4640756A公开(公告)日： 1987-02-03
- 发明人: Jin S. Wang , Kenneth M. Lakin , Allen R. Landin
- 申请人： Jin S. Wang , Kenneth M. Lakin , Allen R. Landin
- 申请人地址： DC Washington
- 专利权人： The United States of America as represented by the United States Department of Energy
- 当前专利权人： The United States of America as represented by the United States Department of Energy
- 当前专利权人地址： DC Washington
- 主分类号： C23C14/22
- IPC分类号： C23C14/22 ; C23C14/34 ; C23C14/35 ; H01J37/34 ; H01L41/24 ; H03H3/02 ; C23C14/38
摘要：
An acoustic shear wave resonator comprising a piezoelectric film having its C-axis substantially inclined from the film normal such that the shear wave coupling coefficient significantly exceeds the longitudinal wave coupling coefficient, whereby the film is capable of shear wave resonance, and means for exciting said film to resonate. The film is prepared by deposition in a dc planar magnetron sputtering system to which a supplemental electric field is applied. The resonator structure may also include a semiconductor material having a positive temperature coefficient of resonance such that the resonator has a temperature coefficient of resonance approaching 0 ppm/.degree.C.
公开/授权文献
- US5896442A Voice announcement technique of an electronic exchange system 公开/授权日：1999-04-20
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