发明授权
- 专利标题: Frictionless supporting apparatus
- 专利标题(中): 无摩擦支撑装置
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申请号: US824930申请日: 1986-01-31
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公开(公告)号: US4684315A公开(公告)日: 1987-08-04
- 发明人: Kenji Sugishima , Hiroshi Yasuda
- 申请人: Kenji Sugishima , Hiroshi Yasuda
- 申请人地址: JPX Kanagawa
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JPX Kanagawa
- 优先权: JPX57-171243 19820930
- 主分类号: H01J37/305
- IPC分类号: H01J37/305 ; F16C39/06 ; G03F7/20 ; H01J37/20 ; H01L21/027 ; H01L21/30 ; B23Q1/26 ; G21K5/10
摘要:
A frictionless supporting apparatus comprising a horizontally plane working table having magnet portions on its peripheries. Pairs of stationary magnets define therebetween a vertical space into which the working table is inserted. Magnetic repulsion between the magnet portions of the working table and the pairs of stationary magnets frictionlessly hold the working table between the pairs of stationary magnets. The working table also has vertical guide portions made of magnets extending along a predetermined one horizontal direction. A plane auxiliary table is arranged substantially in parallel to the working table. A motor is mounted on the auxiliary table for moving the working table in the predetermined one horizontal direction with respect to the auxiliary table. Pairs of guide magnets are provided on the auxiliary table, defining therebetween a horizontal space into which the guide portions of the working table are inserted. Magnetic repulsion between the vertical guide portions of the working table and the pairs of magnets of the auxiliary table frictionlessly guide the working table along the pairs of guide magnets, when the working table is moved in the predetermined one horizontal direction with respect to the auxiliary table. The auxiliary table is also frictionlessly supported and guided in a horizontal direction perpendicular to the predetermined direction with respect to the stationary base.
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