发明授权
US4705731A Member having substrate with protruding surface light receiving layer of amorphous silicon and surface reflective layer 失效
具有具有非晶硅和表面反射层的突出表面光接收层的衬底的构件

Member having substrate with protruding surface light receiving layer of
amorphous silicon and surface reflective layer
摘要:
A light-receiving member comprises a substrate having a large number of protruding portions on a surface thereof, each of said protruding portions having at a predetermined cut position a sectional shape comprising a main projection and a subprojection, the main projection and the subprojection overlapping each other, and a light-receiving layer with a multi-layer structure having a first layer comprising an amorphous material containing silicon atoms and germanium atoms, a second layer comprising an amorphous material containing silicon atoms and exhibiting photoconductivity, and a surface layer having the reflection preventive function provided successively from the substrate side, said light-receiving layer containing at least one selected from oxygen atoms, carbon atoms and nitrogen atoms.
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