发明授权
- 专利标题: Method of making magneto-optical recording medium
- 专利标题(中): 制作磁光记录介质的方法
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申请号: US33840申请日: 1987-04-03
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公开(公告)号: US4735698A公开(公告)日: 1988-04-05
- 发明人: Masaaki Nomura , Takashi Yamada , Ryoichi Yamamoto , Akira Nahara
- 申请人: Masaaki Nomura , Takashi Yamada , Ryoichi Yamamoto , Akira Nahara
- 申请人地址: JPX
- 专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人地址: JPX
- 优先权: JPX61-83717 19860411
- 主分类号: G11B11/10
- IPC分类号: G11B11/10 ; C23C14/56 ; G11B5/851 ; G11B11/105 ; B05D5/12 ; C23C16/00 ; G11B7/26
摘要:
A method of making a magneto-optical recording medium comprises the steps of moving a rotating substrate along a first dielectric target, at least one rare earth metal target, and a second dielectric target which are disposed in this order from an upstream side toward the downstream side in an in-line sputtering apparatus, and carrying out simultaneous sputtering on the substrate in the course of the movement of the substrate by use of the first dielectric target and the rare earth metal target. Thereafter, sputtering is carried out on the substrate by use of the rare earth metal target. Then, simultaneous sputtering is carried out on the substrate by use of the rare earth metal target and the second dielectric target.
公开/授权文献
- US5329869A Closure latching mechanism 公开/授权日:1994-07-19
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