发明授权
US4759628A Wavelength scanning interferometry and interferometer employing laser
diode
失效
采用激光二极管的波长扫描干涉仪和干涉仪
- 专利标题： Wavelength scanning interferometry and interferometer employing laser diode
- 专利标题（中）： 采用激光二极管的波长扫描干涉仪和干涉仪
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申请号： US826341申请日： 1986-02-05
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公开(公告)号： US4759628A公开(公告)日： 1988-07-26
- 发明人: Kimio Tatsuno , Yoshito Tsunoda , Masatoshi Ohtake , Keiji Kataoka , Seiji Yonezawa
- 申请人： Kimio Tatsuno , Yoshito Tsunoda , Masatoshi Ohtake , Keiji Kataoka , Seiji Yonezawa
- 申请人地址： JPX Tokyo
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX60-42642 19850306
- 主分类号： G01J9/02
- IPC分类号： G01J9/02 ; G01B9/02 ; G01J3/45 ; G01J9/04
摘要：
In an interferometry wherein a light beam from a light source is divided in two, one of which is used as a reference beam and the other beam is used as an inspecting beam, and the two beams are projected again on an identical plane so as to form an interference pattern; a wavelength scanning type laser diode interferometry characterized in that a laser diode is employed as the light source, and that an injection current of the laser diode is modulated thereby to scan a wavelength of the laser diode and to change an intensity distribution of the interference pattern.