发明授权
- 专利标题: Conveying apparatus
- 专利标题(中): 输送装置
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申请号: US929594申请日: 1986-11-10
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公开(公告)号: US4766993A公开(公告)日: 1988-08-30
- 发明人: Tadae Kita , Akihiro Okuno
- 申请人: Tadae Kita , Akihiro Okuno
- 申请人地址: JPX Kawasaki
- 专利权人: Fuji Electric Co., Ltd.
- 当前专利权人: Fuji Electric Co., Ltd.
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX60-254187 19851113
- 主分类号: B60L13/04
- IPC分类号: B60L13/04 ; B61B13/08 ; B65G54/02 ; H01L21/677 ; B65G35/00
摘要:
There is provided specialized conveying apparatus for transporting articles which are confined to a tube or chamber within which the cleanliness is maintained at extremely high levels by utilizing existing precipitator and other apparatus, the motion of the pallet on which the articles to be processed are carried being produced by a motor-driven truck which is isolated pneumatically from the article-carrying pallet but which is coupled magnetically to elements on that pallet so that the pallet is levitated in the controlled atmosphere and caused to move by the moving of a truck in the isolated driver portion of the apparatus, all of the dust and other contaminants which are produced in the frictional process of driving the truck being isolated from the clean chamber in which the article is being processed by reason of a nonmagnetic wall separating the driver portion from the conveying portion of the apparatus, the result being the ability to obtain previously unachievable, high levels of cleanliness in the clean chamber.
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