公开(公告)号：US4766993A

公开(公告)日：1988-08-30

申请号：US929594

申请日：1986-11-10

申请人： Tadae Kita ,  Akihiro Okuno

发明人： Tadae Kita ,  Akihiro Okuno

IPC分类号： B60L13/04 ,  B61B13/08 ,  B65G54/02 ,  H01L21/677 ,  B65G35/00

CPC分类号： H01L21/67706 ,  B61B13/08 ,  H01L21/67709

摘要： There is provided specialized conveying apparatus for transporting articles which are confined to a tube or chamber within which the cleanliness is maintained at extremely high levels by utilizing existing precipitator and other apparatus, the motion of the pallet on which the articles to be processed are carried being produced by a motor-driven truck which is isolated pneumatically from the article-carrying pallet but which is coupled magnetically to elements on that pallet so that the pallet is levitated in the controlled atmosphere and caused to move by the moving of a truck in the isolated driver portion of the apparatus, all of the dust and other contaminants which are produced in the frictional process of driving the truck being isolated from the clean chamber in which the article is being processed by reason of a nonmagnetic wall separating the driver portion from the conveying portion of the apparatus, the result being the ability to obtain previously unachievable, high levels of cleanliness in the clean chamber.

摘要翻译： 提供专门的输送设备，用于输送限制在通过利用现有除尘器和其他设备将清洁度保持在非常高的水平的管或室内的物品，待处理物品的托盘的运动是 由马达驱动的卡车产生，该卡车从携带货物的托盘气动地隔离，但是与该托盘上的元件磁耦合，使得托盘悬浮在受控的气氛中并且通过卡车在隔离件中的移动而移动 驾驶部分的驱动部分，在驾驶卡车的摩擦过程中产生的所有灰尘和其他污染物与从制造商处理的清洁室隔离，这是因为将驱动器部分与输送机分开的非磁性壁 该装置的一部分，其结果是获得以前不可实现的高水平的能力 清洁室内的清洁度。