发明授权
US4770830A Process for preparation of high .alpha.-type silicon nitride powder 失效
高α型氮化硅粉末的制备方法

Process for preparation of high .alpha.-type silicon nitride powder
摘要:
Disclosed is a process for the preparation of high .alpha.-type silicon nitride powder, wherein a nitrogen-containing silane compound and/or amorphous silicon nitride is crystallized to form crystalline silicon nitride. In this process, crystalline silicon nitride having a particle size not larger than 0.05 .mu.m is incorporated in an amount of at least 0.1% by weight into the nitrogen-containing silane compound and/or amorphous silicon nitride, the mixture is formed into a power or molded body having a powder bulk density of at least 0.1 g/cm.sup.3 as silicon, and the powder or molded body is heated to 1,350.degree. to 1,700.degree. C. while controlling the temperature-elevating rate to at least 15.degree. C./min throughout the temperature range of from 1,200.degree. to 1,350.degree. C. The resulting high .alpha.-type silicon nitride is composed of a fine granular crystal and the does not contain a needle crystal or columnar crystal.
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