Invention Grant
- Patent Title: Method for etching materials
- Patent Title (中): 腐蚀材料的方法
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Application No.: US929419Application Date: 1986-11-12
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Publication No.: US4772365APublication Date: 1988-09-20
- Inventor: Rainer D. Haas
- Applicant: Rainer D. Haas
- Applicant Address: DEX
- Assignee: Hans Hollmuller Maschinenbau GmbH & Co.
- Current Assignee: Hans Hollmuller Maschinenbau GmbH & Co.
- Current Assignee Address: DEX
- Priority: DEX3539886 19851111
- Main IPC: C23F1/08
- IPC: C23F1/08 ; C23F1/16 ; H05K3/06 ; C25F3/02 ; C25F5/00 ; C25F7/02
Abstract:
In a method for etching material to be etched, which consists at least partly of metal, an acid is used, which attacks the metal solely after the addition of an oxidizing agent directly before the actual etching operation. The addition of the oxidizing agent takes place in a quantity which slightly exceeds the quantity stoichiometrically necessary for removing the entire metal, so that a small residue of oxidizing agent remains in the etching medium dropping from the material to be etched. This residual oxidizing agent is then removed from the etching medium by a special device, which contains an excess of metal able to be etched by the etching medium.
Public/Granted literature
- US5939787A Semiconductor device having a multi-layer contact structure Public/Granted day:1999-08-17
Information query
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