发明授权
- 专利标题: Compact particle flux monitor
- 专利标题(中): 紧凑型粒子通量监测仪
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申请号: US41795申请日: 1987-04-23
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公开(公告)号: US4804853A公开(公告)日: 1989-02-14
- 发明人: Peter Borden , Laszlo Szalai , Jon Munson
- 申请人: Peter Borden , Laszlo Szalai , Jon Munson
- 申请人地址: CA Mountain View
- 专利权人: High Yield Technology
- 当前专利权人: High Yield Technology
- 当前专利权人地址: CA Mountain View
- 主分类号: G01N15/02
- IPC分类号: G01N15/02 ; G01N21/53
摘要:
A compact particle flux monitor is formed with an enclosure through which a laser beam is directed by a lens. An aperture in the enclosure allows free particles which are to be detected to pass through a sensing area at a limiting acceptance angle thereby providing an indication of direction of particle flow. Photodiodes mounted at the sensing area detect the particles, including relatively small particles, by means of the high intensity beam portion at the region of the focal point of the light beam. The response region along the diverging beam is relatively long so that the response as a function of particle size is above background noise level.
公开/授权文献
- US5914568A Plasma processing apparatus 公开/授权日:1999-06-22
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