公开(公告)号：US4804853A

公开(公告)日：1989-02-14

申请号：US41795

申请日：1987-04-23

申请人： Peter Borden ,  Laszlo Szalai ,  Jon Munson

发明人： Peter Borden ,  Laszlo Szalai ,  Jon Munson

IPC分类号： G01N15/02 ,  G01N21/53

CPC分类号： G01N15/0205 ,  G01N2021/4707 ,  G01N21/53

摘要： A compact particle flux monitor is formed with an enclosure through which a laser beam is directed by a lens. An aperture in the enclosure allows free particles which are to be detected to pass through a sensing area at a limiting acceptance angle thereby providing an indication of direction of particle flow. Photodiodes mounted at the sensing area detect the particles, including relatively small particles, by means of the high intensity beam portion at the region of the focal point of the light beam. The response region along the diverging beam is relatively long so that the response as a function of particle size is above background noise level.

摘要翻译： 紧凑的粒子通量监视器形成有外壳，激光束通过该外壳由透镜引导。 外壳中的孔允许被检测的游离颗粒以限制的接受角度通过感测区域，从而提供颗粒流动方向的指示。 安装在感测区域的光电二极管通过在光束焦点的区域处的高强度光束部分来检测包括相对小的颗粒的颗粒。 沿着发散光束的响应区域相对较长，使得作为粒子尺寸的函数的响应高于背景噪声水平。

公开(公告)号：US5275303A

公开(公告)日：1994-01-04

申请号：US830809

申请日：1992-02-03

申请人： Laszlo Szalai

发明人： Laszlo Szalai

IPC分类号： E05F15/04 ,  F16K1/20 ,  B65D43/26

CPC分类号： F16K1/205 ,  E05F15/53 ,  F16K1/2007 ,  F16K1/2078

摘要： This invention provides a closure means for an aperture in a semiconductor deposition furnace, the closure means including an aperture cover plate; at least one articulated linkage including at least two arms, the arms being pivotally mounted with respect to each other to define an angle between them such that variation of the angle causes the plate to move between an aperture closing position and an open position in which the plate is clear of the aperture; and an actuator for driving the articulated linkage and for locking the plate in the aperture closing position. The articulated linkage is in the form of a first arm connected to the cover plate, and a second arm for transferring motive force from the actuator to the first arm. As the plate is moved from its open position to its aperture closing position, the angle between the first and second arms changes from a relatively small angle to a relatively large angle.

摘要翻译： 本发明提供了一种用于半导体沉积炉中的孔的封闭装置，封闭装置包括孔盖板; 至少一个铰接式连杆，包括至少两个臂，所述臂相对于彼此枢转地安装以在它们之间限定角度，使得角度的变化使得板在孔关闭位置和打开位置之间移动， 板是没有孔; 以及用于驱动铰接连杆机构并将板锁定在孔关闭位置的致动器。 铰接连杆机构是连接到盖板的第一臂的形式，以及用于将动力从致动器传递到第一臂的第二臂。 当板从其打开位置移动到其关闭位置时，第一和第二臂之间的角度从相对小的角度变化到相对较大的角度。

公开(公告)号：US5287725A

公开(公告)日：1994-02-22

申请号：US082142

申请日：1993-06-23

申请人： Jun Zhao ,  Laszlo Szalai ,  Boris Fishkin ,  Terry Francis

发明人： Jun Zhao ,  Laszlo Szalai ,  Boris Fishkin ,  Terry Francis

IPC分类号： G01N1/22 ,  G01N1/00 ,  G01N15/00 ,  G01N21/37 ,  H01L21/66

CPC分类号： G01N1/4022

摘要： Surface Volatile Material Detector including a vacuum chamber that is adapted to hold a silicon wafer for testing. The surface of the wafer is exposed to a heat source which evaporates the volatile contaminants on the surface of the wafer. A gas composition analyzer samples the atmosphere within the chamber to detect the evaporated contaminants. The device is designed such that the wafer is thermally insulated from the chamber, whereby the wafer is heated while the chamber walls remain cool, and any contaminants which might exist on the walls of the chamber are not evaporated. In the preferred embodiment, the wafer is heated by infrared light illumination.

摘要翻译： 表面挥发性物质检测器，包括适于保持硅晶片进行测试的真空室。 晶片的表面暴露于蒸发晶片表面上的挥发性污染物的热源。 气体成分分析仪对室内的气氛进行采样，以检测蒸发的污染物。 设备被设计成使得晶片与腔室隔热，由此在室壁保持冷却的同时加热晶片，并且可能存在于腔室壁上的任何污染物都不会蒸发。 在优选实施例中，通过红外光照明来加热晶片。