发明授权
US4808829A Mark position detection system for use in charged particle beam apparatus
失效
用于带电粒子束装置的标记位置检测系统
- 专利标题: Mark position detection system for use in charged particle beam apparatus
- 专利标题(中): 用于带电粒子束装置的标记位置检测系统
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申请号: US63018申请日: 1987-06-17
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公开(公告)号: US4808829A公开(公告)日: 1989-02-28
- 发明人: Masahide Okumura , Takashi Matsuzaka , Genya Matsuoka , Kazumi Iwadate , Tadahito Matsuda , Ryoichi Yamaguchi
- 申请人: Masahide Okumura , Takashi Matsuzaka , Genya Matsuoka , Kazumi Iwadate , Tadahito Matsuda , Ryoichi Yamaguchi
- 申请人地址: JPX Tokyo JPX Tokyo
- 专利权人: Hitachi Ltd.,Nippon Telegraph and Telephone Corp.
- 当前专利权人: Hitachi Ltd.,Nippon Telegraph and Telephone Corp.
- 当前专利权人地址: JPX Tokyo JPX Tokyo
- 优先权: JPX61-140069 19860618
- 主分类号: G03F9/00
- IPC分类号: G03F9/00 ; G01Q30/02 ; G01Q30/04 ; H01J37/304 ; H01L21/027 ; H01L21/30 ; G01N23/22
摘要:
A mark position detection system used in a charged particle beam apparatus and including detection circuit for detecting a reflected electron generated at a mark when the mark is scanned with a charged particle beam, to obtain a mark signal, and signal processing circuit for comparing the mark signal from the detection circuit with a predetermined threshold level to find the position of the charged particle beam at a time the mark signal traverses the threshold level, thereby detecting the position of a mark edge, is disclosed in which, when the mark signal traverses the threshold level and has a peak value exceeding a predetermined value, it is determined by the signal processing circuit that the position of the charged particle beam at a time point at which the mark signal traverses the threshold level is the position of the mark.
公开/授权文献
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