Invention Grant
US4810933A Surface wave launchers to produce plasma columns and means for producing
plasma of different shapes
失效
表面波发射器产生等离子体柱和产生不同形状的等离子体的装置
- Patent Title: Surface wave launchers to produce plasma columns and means for producing plasma of different shapes
- Patent Title (中): 表面波发射器产生等离子体柱和产生不同形状的等离子体的装置
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Application No.: US903519Application Date: 1986-07-02
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Publication No.: US4810933APublication Date: 1989-03-07
- Inventor: Michel Moisan , Zenon Zakrzewski
- Applicant: Michel Moisan , Zenon Zakrzewski
- Applicant Address: CAX Montreal
- Assignee: Universite de Montreal
- Current Assignee: Universite de Montreal
- Current Assignee Address: CAX Montreal
- Priority: CAX486389 19850705
- Main IPC: H05H1/46
- IPC: H05H1/46 ; H01J11/04 ; H01J65/04 ; H01P1/20
Abstract:
The present invention relates to a device for generating plasma (ionizing gas) by a propagating surface wave. The device comprises a wave launching structure mounted on a plasma vessel and connected to an impedance matching network. The latter comprises a coupler and a tuner which is either formed by a section of a transmission line or is of the lumped circuitry type. The launching structure may either generate an azimuthally symmetric or a non symmetric propagating wave. This invention also relates to a method and a device for shaping plasma which comprises a plasma vessel receiving a surface wave generator and having a serviceable portion of a size and/or shape substantially different from the shape and/or size of the portion of the plasma vessel receiving the wave generator.
Public/Granted literature
- US4214679A Measured quantity dispenser Public/Granted day:1980-07-29
Information query
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