发明授权
- 专利标题： Probe apparatus
- 专利标题（中）： 探头设备
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申请号： US100199申请日： 1987-09-23
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公开(公告)号： US4812901A公开(公告)日： 1989-03-14
- 发明人: Wataru Karasawa
- 申请人： Wataru Karasawa
- 申请人地址： JPX Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX61-233480 19860930
- 主分类号： G05B19/18
- IPC分类号： G05B19/18 ; G01R1/073 ; G05B19/404 ; H01L21/66 ; H01L21/68 ; H04N7/00
摘要：
A probe apparatus is disclosed, in which, when performing a predetermined processing on an object having a pattern recurring at a predetermined pitch by moving the object at a pitch equal to the predetermined pitch, the difference between the pitch of actual movement of the object and the pitch of the recurrence of pattern is detected by pattern recognition, and the pitch of movement of the object is corrected according to the detected difference.
公开/授权文献
- USD424733S Ceiling mounted light fixture 公开/授权日：2000-05-09