Invention Grant
- Patent Title: HcCdTe epitaxially grown on crystalline support
- Patent Title (中): HcCdTe在晶体支持物上外延生长
-
Application No.: US92858Application Date: 1987-09-03
-
Publication No.: US4846926APublication Date: 1989-07-11
- Inventor: Robert E. Kay , Hakchill Chan , Fred Ju , Burton A. Bray
- Applicant: Robert E. Kay , Hakchill Chan , Fred Ju , Burton A. Bray
- Applicant Address: CA Newport Beach
- Assignee: Ford Aerospace & Communications Corporation
- Current Assignee: Ford Aerospace & Communications Corporation
- Current Assignee Address: CA Newport Beach
- Main IPC: C30B25/02
- IPC: C30B25/02 ; C30B25/22 ; H01L21/363
Abstract:
A layer of HgCdTe (15) epitaxially grown on a crystalline support (10). A single crystal CdTe substrate (5) is first epitaxially grown to a thickness of between 1 micron and 5 microns onto the support (10). Then a HgTe source (3) is spaced from the CdTe substrated (5) a distance of between 0.1 mm and 10 mm. The substrate (5) and source (3) are heated together in a thermally insulating, reusable ampoule (17) within a growth temperature range of between 500.degree. C. and 625.degree. C. for a growth time of between 5 minutes and 13 hours. In a first growth step embodiment, the source (3) and substrate (5) are isothermal. In a second growth step embodiment, the source (3) and substrate (5) are non-isothermal. Then an optional interdiffusion step is performed, in which the source (3) and substrate (5) are cooled within a temperature range of between 400.degree. C. and 500.degree. C. for a time of between 1 hour and 16 hours. Means are disclosed for preventing contamination of the reactants during HgTe (3) synthesis, and for polishing the finished HgCdTe layer (15).
Public/Granted literature
- US5979396A EGR control system for engine Public/Granted day:1999-11-09
Information query
IPC分类: