Invention Grant
US4873868A Force measurement sensor integrated on silicon, and a method of
manufacture
失效
集成在硅上的力测量传感器和一种制造方法
- Patent Title: Force measurement sensor integrated on silicon, and a method of manufacture
- Patent Title (中): 集成在硅上的力测量传感器和一种制造方法
-
Application No.: US162329Application Date: 1988-02-09
-
Publication No.: US4873868APublication Date: 1989-10-17
- Inventor: Andre Pierre , Francois Batllteu , Jean-Pierre Brosselard , Alfred Permuy , Francois-Xavier Pirot , Serge Spirkovitch
- Applicant: Andre Pierre , Francois Batllteu , Jean-Pierre Brosselard , Alfred Permuy , Francois-Xavier Pirot , Serge Spirkovitch
- Applicant Address: FRX Ecully Cedex
- Assignee: Metravib R.D.S.
- Current Assignee: Metravib R.D.S.
- Current Assignee Address: FRX Ecully Cedex
- Priority: FRX8608525 19860610
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G01D5/241 ; G01P15/08 ; G01P15/12
Abstract:
A mechanical magnitude sensor integrated on silicon, and a method of manufacture. The sensor comprises a bendably deformable conductive blade (4) whose free end (43) constitutes the first plate of a variable capacitor whose fixed second plate (24) is constituted by a conductive zone formed on the silicon substrate. A JFET type structure is formed in the vicinity of the anchor point (41) of the blade (4) with a gate zone (21) situated beneath the anchor portion (41) and with drain and source zones (22, 23) being provided on either side of the gate zone (21) in order to amplify a signal representative of variations in the position of the flexible blade (4). The sensor may be used as an accelerometer or as a pressure sensor.
Public/Granted literature
- US5405192A Modular booth display assembly Public/Granted day:1995-04-11
Information query