公开(公告)号：US4873868A

公开(公告)日：1989-10-17

申请号：US162329

申请日：1988-02-09

Applicant: Andre Pierre ,  Francois Batllteu ,  Jean-Pierre Brosselard ,  Alfred Permuy ,  Francois-Xavier Pirot ,  Serge Spirkovitch

Inventor： Andre Pierre ,  Francois Batllteu ,  Jean-Pierre Brosselard ,  Alfred Permuy ,  Francois-Xavier Pirot ,  Serge Spirkovitch

IPC: B81B3/00 ,  G01D5/241 ,  G01P15/08 ,  G01P15/12

CPC classification number: G01D5/2417 ,  B81B3/0005 ,  G01P15/0802 ,  G01P15/123 ,  B81B2203/0118 ,  B81C2201/112 ,  G01P2015/0828

Abstract: A mechanical magnitude sensor integrated on silicon, and a method of manufacture. The sensor comprises a bendably deformable conductive blade (4) whose free end (43) constitutes the first plate of a variable capacitor whose fixed second plate (24) is constituted by a conductive zone formed on the silicon substrate. A JFET type structure is formed in the vicinity of the anchor point (41) of the blade (4) with a gate zone (21) situated beneath the anchor portion (41) and with drain and source zones (22, 23) being provided on either side of the gate zone (21) in order to amplify a signal representative of variations in the position of the flexible blade (4). The sensor may be used as an accelerometer or as a pressure sensor.

Abstract translation: PCT No.PCT / FR87 / 00206 Sec。 371日期1988年2月9日 102（e）日期1988年2月9日PCT Filted 1987年6月10日PCT公布。 出版物WO87 / 07729 日期：1987年12月17日。集成在硅上的机械振幅传感器及其制造方法。 传感器包括可弯曲变形的导电叶片（4），其自由端（43）构成可变电容器的第一板，其固定的第二板（24）由形成在硅衬底上的导电区构成。 JFET型结构形成在叶片（4）的锚点（41）附近，具有位于锚定部分（41）下方的浇口区域（21），并且设置有排泄和源区域（22,23） 在门区（21）的任一侧上，以放大表示柔性叶片（4）的位置变化的信号。 传感器可以用作加速度计或压力传感器。

公开(公告)号：US07118681B2

公开(公告)日：2006-10-10

申请号：US10746354

申请日：2003-12-24

Applicant: Francois-Xavier Pirot

Inventor： Francois-Xavier Pirot

IPC: B29D11/00 ,  G11B7/00

CPC classification number: G11B7/261 ,  G11B7/263

Abstract: A method for fabricating an optical disk master including fabricating a precursor formed from a substrate including at least one layer of metallic material and having at least one protuberance or indentation guiding track; preparing the precursor by superposing on the substrate at least one layer of a first material and a second material different from the first material; eroding at least a portion of a surface of one of the materials to only allow to subsist one of the materials at a site of the guiding tracks; depositing on the surface a reactive resin; personalizing the precursor by structuring the reactive surface as a function of information specific to the master to locally eliminate the reactive resin; performing etching zones of the second material at a site of unmasked guiding tracks; and eliminating subsisting deposits of resin and the first material outside of the zones where it is covered by the second material.

Abstract translation: 一种制造光盘母盘的方法，包括制造由包括至少一层金属材料的基底形成的前体，并具有至少一个突起或压痕导轨; 通过在衬底上叠加至少一层第一材料和不同于第一材料的第二材料来制备前体; 侵蚀其中一种材料的表面的至少一部分，以允许在导轨的位置处存在材料之一; 在表面上沉积反应性树脂; 通过构建反应性表面作为母体特有的信息的函数来个性化前体以局部消除反应性树脂; 在未掩蔽的导轨的位置处执行第二材料的蚀刻区; 并且消除树脂和第二材料覆盖的区域之外的第一材料的存在的沉积物。

公开(公告)号：US5306573A

公开(公告)日：1994-04-26

申请号：US4650

申请日：1993-01-14

Applicant: Francois-Xavier Pirot ,  Jean-Marc Coutellier ,  Thierry Valet

Inventor： Francois-Xavier Pirot ,  Jean-Marc Coutellier ,  Thierry Valet

IPC: G11B5/31 ,  G11B5/39 ,  H01L43/08 ,  B32B9/00

CPC classification number: G11B5/3958 ,  G11B5/3903 ,  G11B5/3163 ,  Y10S428/90 ,  Y10T29/49036 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T428/1171

Abstract: The invention relates to a process for producing a plurality of magnetoresistive sensors on the same substrate. The invention particularly has as its object to facilitate a polishing phase of this process. The process of the invention comprises depositing a layer of a magnetoresistive material on a substrate, and then forming in this layer a plurality of magnetoresistive elements. The process further comprises making, at the site of each sensor and before the depositing the magnetoresistive layer, an inclined surface, in such a way that each magnetoresistive element is formed on this inclined surface and exhibits an edge directed outward from the substrate.

Abstract translation: 本发明涉及在同一基板上制造多个磁阻传感器的方法。 本发明的目的是为了便于该方法的抛光阶段。 本发明的方法包括在衬底上沉积磁阻材料层，然后在该层中形成多个磁阻元件。 该方法还包括在每个传感器的位置和在沉积磁阻层之前制成一个倾斜表面，使得每个磁阻元件形成在该倾斜表面上并呈现出从基板向外指向的边缘。