Invention Grant
- Patent Title: Organometallic compounds
- Patent Title (中): 有机金属化合物
-
Application No.: US96583Application Date: 1987-09-15
-
Publication No.: US4880492APublication Date: 1989-11-14
- Inventor: Dietrich Erdmann , Max E. Van Ghemen , Ludwig Pohl , Herbert Schumann , Uwe Hartmann , Wilfried Wassermann , Meino Heyen , Holger Jurgensen
- Applicant: Dietrich Erdmann , Max E. Van Ghemen , Ludwig Pohl , Herbert Schumann , Uwe Hartmann , Wilfried Wassermann , Meino Heyen , Holger Jurgensen
- Applicant Address: DEX Darmstadt
- Assignee: Merck Patent Gesellschaft Mit Beschrankter Haftung
- Current Assignee: Merck Patent Gesellschaft Mit Beschrankter Haftung
- Current Assignee Address: DEX Darmstadt
- Priority: DEX3631469 19860916
- Main IPC: C07F5/00
- IPC: C07F5/00 ; C07F5/06 ; C23C16/18 ; C23C16/20 ; C30B25/02 ; C30B29/40 ; H01L21/205
Abstract:
In a process for the production of thin films and epitaxial layers by gas-phase deposition, intramolecularly stabilized organometallic compounds are employed as a source of metal.
Public/Granted literature
- USD417981S Soda bar Public/Granted day:1999-12-28
Information query
